Annealing effects on photoconductive, morphologic and IR absorptional properties of glow discharge a-Si:H films are investigated. Samples are decomposited with pure silane changing two decomposition parameters, growth rate and substrate temperature (
Ts).
Photoconductivity (σ
P) of low
Ts samples is extremely low but steeply increases by 3 orders at certain
Ts as
Ts is raised, and the turning
Ts depends on the growth rate.
The σ
P of the low
Ts samples increases by 12 orders with annealing up to250°C. This large change corresponds to the disappearance of the grain boundary observed by TEM.
Dark conductivity (σ
d) at room temperature shows various transport mechanism depending on the deposition condition.
Localized states density at
Ef estimated from γ (σ
P∝F
γ,
F : intensity) decreases as
Ts is raised or annealed up to 150250°C.
These results are discussed in some detail.
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