Shinku

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The mechanism of electrochromism of amorphous V₂O₅ thin films prepared by vacuum evaporation of V₂O₅ powder has been studied by optical absorption, XPS and SIMS measurements. The films are colored and bleached with an aid of electrolytic solution consisting of lithium percholorate (LiClO₄·3H₂O) in propylen carbonate (CH₃CHOCOOCH₂). The color of as grown films is yellow like V₂O₅ powder, while that of colored films is greenish gray like VO₂ powder. The XPS spectra of O_1s and V_2p3/2 core levels of as grown films agree with those of V₂O₅ powder. On the other hand, the spectra of colored films are similar to those of VO₂ powder. SIMS measurements reveal that Li⁺ ions are inserted into films in coloration and exhausted in bleaching. From these results, it is concluded that the coloration of a-V₂O₅ films is due to a change of molecular state of V₂O₅ into VO₂. This change is caused by a double injection of electrons and Li⁺ ions into films.

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Auger electron spectroscopy of insulator polyimide films has been studied from the viewpoint of discharging effect in order to facilitate surface analysis of contact hole formed by Ar laser beam irradiation. Polyimide surface was found to become conductive by electron bombardment. The conductive layer formation is easily observed by SEM absorption image, and is found to be slightly lack of imide bonding. By means of the conductive layer and evaporated Al pattern, Auger analysis with high energy electron beam and high incident angle was accomplished without charging-up phenomena.

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