巻号一覧
30 巻, 7 号
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平井 敏雄, 山根 久典1987 年 30 巻 7 号 p. 559-605
発行日: 1987/07/20
公開日: 2009/10/20
ジャーナル フリーPDF形式でダウンロード (1586K) -
峰田 進栄, 安永 暢男, 木幡 護, 袴塚 康治, 池田 正幸1987 年 30 巻 7 号 p. 606-612
発行日: 1987/07/20
公開日: 2010/01/30
ジャーナル フリーA new ceramic coating technique was developed using high power CO2 laser (1001000 W) as an evaporating heat source. Coating experiment of various oxide and nitride ceramics onto metal substrates revealed that homogeneous hard films of amorphous structure could be prepared with high deposition rates (for example, in the case of mullite film, 0.6, μm/min at 320 W). It should be noticed that BN film formed by the laser deposition with the source of soft hBN ceramics showed very high hardness over Hk4000 kg/mm2. By simultanious irradiation of N ions generated through Kaufman type ion source nearly stoichiometric boron nitride films, can be formed which are considered to have a cubic structure.抄録全体を表示PDF形式でダウンロード (1045K) -
竹内 透, 吉岡 功, 藤野 勝裕1987 年 30 巻 7 号 p. 613-618
発行日: 1987/07/20
公開日: 2009/10/20
ジャーナル フリーTantalum films sputtered in argon are in β-phase with (002) planes strongly oriented parallel to the substrate. The deviation from the standard (002) spacing is reversely proportional to the film stress, and the (002) spacing is proportional to the argon concentration in the films which is determined by the argon pressure in the sputtering vessel (the higher the pressure the lower the concentration).
When the argon concentration is higher/lower than 2, 800 ppm the film shows compressive/tensile stress. The tensile stress can relax with the generation of microcracks.抄録全体を表示PDF形式でダウンロード (1036K) -
楠 勲, 村上 純一, 照井 佳幸, 小林 隆, 百目鬼 英雄1987 年 30 巻 7 号 p. 619-623
発行日: 1987/07/20
公開日: 2009/10/20
ジャーナル フリーA new stepping motor which has been developed for use in UHV. It was equipped with dry bearings for vacuum and bakeable up to 200°C. The performance of the motor was examined in UHV apparatuses. After a few days' pumping and baking, out gas from the motor in holding condition was negligible in UHV. The residual gas was analyzed by a mass filter, and normal species in UHV, i.e. H2, CH4, H2O, CO, CO2, and hydrocabons, were found. In operating condition rising of the pressure was observed to be proportional to the pulse rate (revolution rate). The dominant components of the out gas were H2O, CO, and CO2. Increasing rate of the temperature during the operation was small for the low pulse rate up to 500 pps, and the temperature was kept under 200°C for long operation.抄録全体を表示PDF形式でダウンロード (487K)
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