巻号一覧
31 巻, 12 号
選択された号の論文の5件中1～5を表示しています
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横倉 賢治, 池田 佳隆, 菅沼 和明, 永島 孝, 池田 雅俊1988 年 31 巻 12 号 p. 945-953
発行日: 1988/12/20
公開日: 2009/09/29
ジャーナル フリーPDF形式でダウンロード (1792K) -
大門 寛, 井野 正三1988 年 31 巻 12 号 p. 954-959
発行日: 1988/12/20
公開日: 2009/09/29
ジャーナル フリーA display type spherical mirror analyzer was newly developed and its nature was analyzed in detail. It consists of an inner hemispherical grid, an outer hemispherical electrode whose radius is two times large as that of the inner grid, a small aperture, and two dimensional detector. Only the charged particles with the same kinetic energy can exit through the aperture and the angular distributions of them are observed by the two dimensional detector. The characteristics of the analyzer are (1) the acceptance cone is ultimately wide (2π sr), (2) the pattern obtained is not distorted, and (3) the structure of the components are very simple and easy to construct. The loci of the charged particles, the resolution of the analyzer, and the flight-time of the particles were analytically expressed.抄録全体を表示PDF形式でダウンロード (773K) -
大久保 純一, 稲垣 訓宏1988 年 31 巻 12 号 p. 960-967
発行日: 1988/12/20
公開日: 2010/01/28
ジャーナル フリーA magnetically enhanced-plasma reaction system for plasma polymerization, which was able to operate at low pressure below 10-2 Pa, was made. And influences of system pressure and RF power on plasma polymerization reactions of organometallic complex (Al-acethyl-acetone) were investigated.
The plasma polymerization processes were influenced by the system pressure and the magnitude of RF power to maintain a glow discharge : e.g., IR spectra from the plasma polymers prepared at high system pressure showed broad absorption peaks in 500 cm-1700 cm-1 and 700 cm-11200 cm-1, and two weak absorptions near 1500 cm-1 (v (C =O), v (C = C)). The plasma polymers prepared at low pressure increased in absorptions intensity at 500 cm-1 v (Al-O), v (C-CH3), 750 cm-1 π (CH), and 900 cm-1 v (C =O), v (C = C). The plasma polymerization at low pressure (10-2 Pa) yield plasma polymers not to subject to plasma injury.
The results obtained in this study points out that the system pressure as well as the magnitude of RF power may be an important factor to controll the chemical composition of plasma-polymerized polymers.抄録全体を表示PDF形式でダウンロード (849K) -
池田 孜, 川手 剛雄, 平井 洋1988 年 31 巻 12 号 p. 968-976
発行日: 1988/12/20
公開日: 2009/09/29
ジャーナル フリーThin cBN films were synthesized at 350°C on various substrates such as silicon, stainless steel, TiN and WC-Co by means of an arc-like plasma-enhanced ion plating process. In this process, polycrystalline cBN films were deposited at a rate of 40 to 300 Å/min. The infrared spectra showed a strong absorption at 1050 cm-1, indicating a cubic structure of the deposited film. The electron diffraction patterns also showed a cubic structure with the lattice parameter of 3.63Å. It was inferred that the ion bombardment during the film growth plays an important role in the formation of cBN films. The cBN films deposited in this process had a high compressive stress of 4 ×1010 dyne/cm2, which is significantly greater than the value of amorphous iBN films, 1.6 × 1010 dyne/cm2. The internal stress of cBN films was greatly reduced if iBN was used as a buffer layer between cBN and substrate.抄録全体を表示PDF形式でダウンロード (1270K) -
3.ステンレス鋼真空槽の極高真空技術(2)。4.アルミニウム真空槽の極高真空化技術。大島 忠平, 石丸 肇1988 年 31 巻 12 号 p. 977-984
発行日: 1988/12/20
公開日: 2009/09/29
ジャーナル フリーPDF形式でダウンロード (1107K)
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