Shinku
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
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Volume 33, Issue 1
Displaying 1-4 of 4 articles from this issue
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  • Science of Multicharged Ions
    Yukikazu ITIKAWA
    1990 Volume 33 Issue 1 Pages 1-6
    Published: January 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.1
    JOURNAL FREE ACCESS
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  • Pressure Measurement with Laser
    1. Laser-Ionization Characteristics of Various Kinds of Gases
    Kiyohide KOKUBUN, Shingo ICHIMURA, Hazime SHIMIZU
    1990 Volume 33 Issue 1 Pages 7-14
    Published: January 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.7
    JOURNAL FREE ACCESS
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    For the purpose of applying the laser-ionization method to measuring gas pressure, particularly in the range of UHV and XHV, the laser-ionization characteristics for various kinds of gases have been studied using XeCl, KrF and ArF excimer lasers. The proportional relation between the ionization signal and the gas pressure was experimentally verified to 1 × 10-8 Torr (1.3 × 10-6 Pa). In the case of rare gases and O2 gas, the dependence of the ionization signal on the laser intensity was in agreement with the theory of nonresonant multiphoton ionization. Saturation of ionization was observed in the case of Xe.
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  • Pressure Measurement with Laser
    2. A New Ion Counting System for Laser Generated Ions
    Shingo ICHIMURA, Kiyohide KOKUBUN, Hazime SHIMIZU
    1990 Volume 33 Issue 1 Pages 15-20
    Published: January 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.15
    JOURNAL FREE ACCESS
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    A new ion counting system useful in pressure measurement with laser was constructed. The system is composed of a microchannel-plate intensifier, a CCD camera, a frame buffer, a particle counter, and a personal computer. By applying it to detection of acetone ions ionized by an excimer laser pulse, it was confirmed that the system has i) a high peak counting rate (exceeding 1010 cps), ii) linear response to the number of incident ions, and iii) higher accuracy than conventional analog detection system. The detection limit in the pressure measurement by laser with the present system is also discussed, and the measurement in the pressure range between 10-10 Pa and 100 Pa is projected.
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  • The Observations on the Deformation of Oxygen Free Copper Gaskets for Conflat Seal
    Yasuchika NAGAI, Shuji SAKAI
    1990 Volume 33 Issue 1 Pages 21-27
    Published: January 20, 1990
    Released on J-STAGE: September 29, 2009
    DOIhttps://doi.org/10.3131/jvsj.33.21
    JOURNAL FREE ACCESS
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