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Volume 34, Issue 3

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Studies of Polycrystalline Silicon Using Auger Electron Spectroscopy and Mass Spectroscopy

Tomomi IWATA, Yusuke MIZOKAWA, Motoi NAKAO, Yasushi INOUE, Hiroshi MAT ...

1991 Volume 34 Issue 3 Pages 129-132
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.129

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Characterization of Phosphorus-Doped Polycrystalline Silicon Using Scanning Auger Electron Spectroscopy

Motoi NAKAO, Yusuke MIZOKAWA, Tomomi IWATA, Yasushi INOUE, Hiroshi MAT ...

1991 Volume 34 Issue 3 Pages 133-135
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.133

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Surface Analysis by a TOF-ICISS/ERDA Method

Toshihiro KINOSHITA, Tadashi KOBAYASHI, Koji SUMITOMO, Itsuo KATAYAMA, ...

1991 Volume 34 Issue 3 Pages 136-139
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.136

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Growth Processes of Thin Ag Films on H-Teminated Si (111) Surfaces Studied by ERDA/LEED

Masamichi NAITOH, Fumiya SHOJI, Kenjiro OURA

1991 Volume 34 Issue 3 Pages 140-142
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.140

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Silicide Reaction of Si Thin Film Deposited on Platinum Metal

Katsumi NISHIMORI, Heizo TOKUTAKA, Hirofumi SUMI, Naganori ISHIHARA

1991 Volume 34 Issue 3 Pages 143-146
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.143

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Inverse Photoemission Spectra of Zn and ZnO surface

Tomoyuki OSAKI, Satoshi IKEDA, Ryosuke KONISHI, Hiroshi SASAKURA

1991 Volume 34 Issue 3 Pages 147-150
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.147

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Study on the Adsorbed Species on Si (111) Single Crystal Surface by Second Harmonic Generation (SHG)

Ken NAKAMURA, Hiroyoshi YAMAMOTO, Hazime SHIMIZU, Hiroko HASHIZUME, Ka ...

1991 Volume 34 Issue 3 Pages 151-153
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.151

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Desorption Gases from Aluminium Materials for Extremely High Vacuum

Satoshi FUJIMOTO, Yuko HIROHATA, Tomoaki HINO, Toshiro YAMASHINA

1991 Volume 34 Issue 3 Pages 154-157
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.154

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Tritium Adsorption on the Materials for the Turbomolecular Pump with Active Magnetic Bearing

Hitoshi MIYAKE, Kan ASHIDA, Masao MATSUYAMA, Kuniaki WATANABE, Mitsuru ...

1991 Volume 34 Issue 3 Pages 158-161
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.158

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Outgassing Properties of Stainless Steel with Cr Oxide Film

Masaaki MIYAUCHI, Akira TOHYAMA, Takemi YAMADA, Yuko HIROHATA, Toshiro ...

1991 Volume 34 Issue 3 Pages 162-165
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.162

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Outgassing Characteristics of Stainless Steel Chamber Covered with BN Precipitated Surface

Toshiaki KOBARI, Shinjiroo UEDA, Osamu SATOH, Yasuhiko ISHIDA, Munenob ...

1991 Volume 34 Issue 3 Pages 166-169
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.166

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Measurement of Outgassing from Vacuum Duct Material of Electron Storage Ring by Synchrotron Radiation

Yuuko NAGATORO, Hiroshi USAMI

1991 Volume 34 Issue 3 Pages 170-173
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.170

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Surface Analysis of Stainless Steel irradiated by Synchotron Radiation

Hiroshi USAMI, Yuuko NAGATORO

1991 Volume 34 Issue 3 Pages 174-177
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.174

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Plasma Facing Material Test in Reverse Field Pinch Plasma Device

Hazime SHIMIZU, Kazuo SHIMADA, Youichi HIRANO, Yasuyuki YAGI, Yoshinor ...

1991 Volume 34 Issue 3 Pages 178-181
Published: March 20, 1991
Released on J-STAGE: January 30, 2010

DOIhttps://doi.org/10.3131/jvsj.34.178

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Surface Analysis of 80 K-Phase Bi-Sr-Ca-Cu-O Single Crystal and Thin Film by SEM and SAM

Syoichi KOYAMA, Wataru FUTO, Hideaki HIGASHI, Hiroshi FUJIMOTO, Nagano ...

1991 Volume 34 Issue 3 Pages 182-185
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.182

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XPS Study of 80 K-phase Bi-Sr-Ca-Cu-O Single Crystal and Thin Film

Wataru FUTO, Hideaki HIGASHI, Makoto CHIHAYA, Satoru KISHIDA, Heizo TO ...

1991 Volume 34 Issue 3 Pages 186-188
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.186

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The Formation of Electrodes on 80 K-Phase Bi-Based Superconducting Single Crystals and Their Characteristics as Studied by XPS

Makoto CHIHAYA, Wataru FUTO, Satoru KISHIDA, Heizo TOKUTAKA, Katsumi N ...

1991 Volume 34 Issue 3 Pages 189-191
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.189

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The Formation of Electrodes on High-Tc Oxide Superconductors by Electroplating Method

Hiroya IMAO, Noboru MAKIHARA, Wataru FUTO, Satoru KISHIDA, Heizo TOKUT ...

1991 Volume 34 Issue 3 Pages 192-195
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.192

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Superconducting Single Crystal by RHEED Observation

Kouji YAMANO, Katsumi NISHIMORI, Heizo TOKUTAKA, Satoru KISHIDA, Nagan ...

1991 Volume 34 Issue 3 Pages 196-199
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.196

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MOMBE Growth of AlGaSb

Yasutoshi OKUNO, Hajime ASAHI, Tadaaki KANEKO, Yasusi ITANI, Shun-ichi ...

1991 Volume 34 Issue 3 Pages 200-203
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.200

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Influence of Power Density on Micro-Morphology of Sputtered Mo Films

Estimation by Measurement of Surface Roughness Factor

Yasushi MAKABE, Yuko HIROHATA, Tomoaki HINO, Toshiro YAMASHINA

1991 Volume 34 Issue 3 Pages 204-207
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.204

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Application of Optical Emission Spectroscopy of the RF Sputtering Plasma to Deposition of ZnO Piezoelectric Thin Films

Toshio OGAWA, Atsuo SENDA

1991 Volume 34 Issue 3 Pages 208-211
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.208

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The 100 MHz RF-DC Coupled Bias UHV Sputtering System and Al Films Deposition

Satoru TOYODA, Tetsuji KIYOTA, Kouichi TAMAGAWA, Hiroyuki YAMAKAWA

1991 Volume 34 Issue 3 Pages 212-215
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.212

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Preparations of flat 80K-phase Bi-based Superconducting Thin Films

Hideaki HIGASHI, Satoru KISHIDA, Heizo TOKUTAKA, Katsumi NISHIMORI, Na ...

1991 Volume 34 Issue 3 Pages 216-219
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.216

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The Preliminary Experiments on the Cascade Static Lens Gauge (1)

Hisanori FUKUOKA, Atsushi YOSHIOKA, Keiichi TAKANASHI, Syozo HONGO, To ...

1991 Volume 34 Issue 3 Pages 220-222
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.220

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Properties of the Stainless Steel used for a Extremely-High Vacuum Apparatus

Kiyohide KOKUBUN, Hazime SHIMIZU, Shingo ICHIMURA, Humio Kawahara, Min ...

1991 Volume 34 Issue 3 Pages 223-225
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.223

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Superconding Thin Film Preparation in the Presence of an Oxygen Radical Beam

Shuji KOMURO, Patrick O'KEEFFE, Shoji DEN, Takitaro MORIKAWA, Yoshinob ...

1991 Volume 34 Issue 3 Pages 226-228
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.226

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Characteristics of Microwave Type Ion Source

Hiroshi MURAKAMI, Hazime SHIMIZU

1991 Volume 34 Issue 3 Pages 229-231
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.229

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Rf-Assisted Planner Magnetron as A Coating Device

Kenya AKAISHI, Yusuke KUBOTA, Yasuyuki FUNATO

1991 Volume 34 Issue 3 Pages 232-234
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.232

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Investigation of Particle Loss in a Magnetron-Type Discharge

Yasuyuki FUNATO, Kenya AKAISHI, Tetsuya TUZUKI, Yusuke KUBOTA

1991 Volume 34 Issue 3 Pages 235-237
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.235

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Measurements of Flux and Velocity of Vaporized Atoms by Microbalance Technique

Takashi ASANO, Naohito UETAKE, Kazumichi SUZUKI

1991 Volume 34 Issue 3 Pages 238-240
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.238

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Particle Species Arrived in Substrate During Nitrogen Discharge

Touichi HATANO

1991 Volume 34 Issue 3 Pages 241-243
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.241

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Copper Oxcide Thin Film Deposited by Evaporation assisted Oxigen Ion

Masao NOMA, Masami NAKASONE

1991 Volume 34 Issue 3 Pages 244-246
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.244

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The Effects of Pd-Additive to SnO₂ Thin Film Sensor

Keiji KOBAYASHI, Osamu TAKETOSI, Hisamoti HARADA, Ryousuke KONISI, Hir ...

1991 Volume 34 Issue 3 Pages 247-249
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.247

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ZnO : Al Thin Flims Prepared by Using Facing Target Type Sputtering

Kazuhiro NODA, Yosirou OKAMURA, Toyotarou YASUDA, Hisamochi HARADA, Ry ...

1991 Volume 34 Issue 3 Pages 250-252
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.250

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Preparation of B-N-C Films by Sputtering of Graphite/Boron Nitride Composite Target

Kaoru SHIBATA, Hisayoshi YOSHIDA

1991 Volume 34 Issue 3 Pages 253-255
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.253

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Simulation of Thickness Distribution of Thin Film Grown by Molecular Beam Epitaxy

Hiroki KAWADA, Kazue TAKAHASHI

1991 Volume 34 Issue 3 Pages 256-259
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.256

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Simulation of Temperature Distributions in Kundsen Cell

Kazue TAKAHASHI, Shigeki HIRASAWA, Kazumasa FUJIOKA

1991 Volume 34 Issue 3 Pages 260-263
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.260

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The Study of Si (111) (√3×√3) -Ga Surface Structure by Means of Ga 2p Angle-Resolved XPS

Akira SAITO, Morio HOSOYA, Takashi FUJIKAWA

1991 Volume 34 Issue 3 Pages 264-267
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.264

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SiO₂/Si Interfaces Studied by UHV-STM

Masaaki NIWA, Hiroshi IWASAKI, Hideyuki TANAKA, Isao SUMITA

1991 Volume 34 Issue 3 Pages 268-270
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.268

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Calibration of Nude-Type Ionization Vacuum Gauge Using Spinning Rotor Gauge

Tsutomu OHI, Yoshio KAWATE

1991 Volume 34 Issue 3 Pages 271-274
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.271

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Pressure Measurement at Medium Vacuum by Rayleigh Scattering of Laser Light

Tadanori SAKODA, Kiichiro UCHINO, Shinji MOMII, Katsunori MURAOKA, Hir ...

1991 Volume 34 Issue 3 Pages 275-278
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.275

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Microparticle Behavior in a Low Pressure Vacuum Chamber

Yoshimitsu MORITA, Masanori YAMAGUCHI, Seisaku KAMIYA, Shigenori NAKAT ...

1991 Volume 34 Issue 3 Pages 279-282
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.279

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Temperature Dependence of Outgassing from Stainless Steel in UHV

Yuichi ISHIKAWA, Yuko KOGUCHI, Toshihiko YOSHIMURA

1991 Volume 34 Issue 3 Pages 283-285
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.283

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Outgassing Properties of Ti-N Thin Films (III)

Kazuya SAITO, Kosei ONOE, Sakae INAYOSHI, Sonoko TSUKAHARA

1991 Volume 34 Issue 3 Pages 286-288
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.286

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Effects of in-situ Electrode Surface Treatments on Vacuum Breakdown Voltages

Shinichi KOBAYASHI, Da Xian Sun, Yoshio SAITO

1991 Volume 34 Issue 3 Pages 289-292
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.289

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High Power Examinations of RF Window Materials

Shinichiro MICHIZONO, Yoshio SAITOH, Namio MATUDA, Akira KINBARA

1991 Volume 34 Issue 3 Pages 293-296
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.293

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Surface Discharges on RF Window Dielectrics

Yoshio SAITO, Shin'ichiro MICHIZONO, Shozo ANAMI, Akira KINBARA, Shin' ...

1991 Volume 34 Issue 3 Pages 297-300
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.297

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Fomation of NEG with Plasma-Sprayed Coatings

Katsuya NARUSHIMA, Yoshihiro SATO, Shiro AOKI, Shigeru TSUNOKAKE

1991 Volume 34 Issue 3 Pages 301-305
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.301

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Surface Analysis of Aluminum Alloy Finished with Electrolytic Abrasive Polishing

Tsutomu OHI, Yasuaki OHTSU, Yoshio KAWATE, Toshiki SEGAWA

1991 Volume 34 Issue 3 Pages 306-310
Published: March 20, 1991
Released on J-STAGE: October 20, 2009

DOIhttps://doi.org/10.3131/jvsj.34.306

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