Ar-pumping characteristics of diode-type sputter ion pumps with various shapes of “Ta/Ti” cathode-pairs were measured by an orifice method. Every pump had 30 anode cells (φ 24 mm, 28 mm in length) and 0.15 T of magnetic flux density at the center of the discharge area. The Ar-pumping speed of the pump of a “flat Ta/flat Ti” cathode-pair was about 13
l/s in the 10
-5 Pa range. On the other hand, the Ar-pumping speeds of the pumps of a “holed Ta on flat Ti/flat Ti” cathode pair and of a “slotted Ta on flat Ti/flat Ti” pair were both about 23
l/s in the 10
-5 Pa range. The pump of a “slotted Ta on flat Ti/slotted Ti on flat Ti” pair showed the Ar-pumping speed as 2425
l/s, which was a slightly higher than the speed of the pump of the “slotted Ta on flat Ti/flat Ti” pair. The N
2-pumping speed of the pump of the “slotted Ta on flat Ti/flat Ti” pair was measured as about 50
l/s in the 10-6 Pa range and about 55
l/s in the 10
-5 Pa range. Therefore, the Ar-pumping speed was as high as 42% of the N
2-pumping speed for the pump of a “slotted Ta on flat Ti/flat Ti” cathode-pair.
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