Spinning rotor gauges are widely used as transfer and reference gauges for gauge calibration in high and medium vacuum. The dispersion of a spinning rotor gauge is the dominant cause of the uncertainty in pressure measurement at less than 10
-2 Pa. The minimum value of the standard deviation of the dispersion of 2.6 × 10
-8 Pa is calculated based on sampling interval of 30s and clock pulse frequency of 10 MHz. The rotational signal of a rotor was analyzed by a FFT analyzer. It was clarified that the disorder in the period of rotational signal due to external vibration increases the dispersion. The difference between the standard deviation values obtained from calculations and experiments was also investigated.
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