It is the purpose of this paper to study further the reliability of a cold cathode ionization gauge with a central wire electrode (central wire gauge) about which the previous paper has partly reported.
It has been concluded that with the equipment of the central wire the reliability can be much improved as compared with the ordinary Philips gauge due to the following characteristics :
1) The carbon deposited on the electrode surface, which originates from hydrocarbon such as oil vapor in a vacuum pump and decreases the reading of the gauge, can be simply removed by the discharge keeping the electrical heating of the central wire by a battery. This will be reported in the present paper.
2) In the case of the central wire gauge the variation of magnetic flux density affects the discharge current less and the discharge is more stable than in the case of ordinary Philips gauge. This was reported in the previous paper.
The experiment was carried out at 10
-310
-5 Torr.
抄録全体を表示