Vanadyl phthalocyanine (VOPc) thin films were produced on glass substrates by the molecular beam epitaxy and vacuum deposition techniques. The orientation and alignment of VOPc thin films have been investigated with the thermal stimulated current (TSC) method. The TSC of VOPc thin film deposited on micro-cover-glass (Glass) show P
1 (-60°C), P
2 (-30°C) and P
3 (-5°C) peaks. The TSC of glass alone has P
1 and P
3 peaks so that the origins of P
1 and P
3 peaks may be due to the transition of ions in glass. The P
2 peak does not exist in the TSC of glass alone. Therefore, the origin of P
2 peak seems to be due to the depolarization of VOPc molecules under a structural change of phase I of a VOPc thin film. The depolarization energy is estimated from the relaxation temperature of P
2 peak. It agrees well with the binding energy of Van der Waals crystal.
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