真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
49 巻, 12 号
選択された号の論文の20件中1~20を表示しています
序論
解説
研究
  • Michikazu KINSHO, Yoshio SAITO, Zenzaburo KABEYA, Norio OGIWARA
    2006 年 49 巻 12 号 p. 728-733
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      We successfully developed alumina ceramics vacuum chamber for the 3 GeV-RCS of J-PARC at JAEA. This chamber has titanium flanges and an outer RF shield to reduce duct impedance, and moreover TiN film is coated on the inside surface to preclude charge build up and to reduce secondary emitted electrons. The outgassing rate of the ceramics chamber measured by the conductance modulation method has a sufficiently low value of 1.2×10-8 Pa m3 s-1 m2 after 50 hours pumping. The temperature of the titanium flange became 45°C due to eddy current heating under dipole magnet operation. It was found that the radiation damage to the capacitor used for the RF shield of this duct was small, the capacitance only decreased by 7% after gamma ray irradiation of 30 MGy. In order to determine effect of the ceramics chamber on the proton beam, this ceramics chamber prepared for J-PARC was installed instead in the 12 GeV main ring at KEK-PS. The proton beam could be controlled to accelerate stably after installation, and thus it was found that this chamber did not influence the beam very much. This ceramics chamber is thus usable for the 3 GeV-RCS of J-PARC.
  • Byung-Ho CHOI, Mi Young PARK, Kui Young KIM, Kye Ryung KIM, Jun Yeon K ...
    2006 年 49 巻 12 号 p. 734-738
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      The Proton Engineering Frontier Project (PEFP), approved and launched by the Korean government in July 2002, includes a 100 MeV proton linear accelerator (linac) development and programs for its utilization and application. The main goals in the first phase of the project, spanning from 2002 to 2005, were the design of a 100 MeV proton linac and the development of a 20 MeV linac consisting of a 50 keV proton injector, a 3 MeV radio frequency quadrupole (RFQ), and a 20 MeV drift tube linac (DTL). The 50 keV injector and 3 MeV RFQ have been installed and tested, and the 20 MeV DTL is being assembled, tuned and under a beam test. At the same time, the utilization programs using the proton beam have been planned, and some are now under way. The vacuum system of the 20 MeV proton linac and its related issues, especially in operation with a high duty, are discussed in detail.
  • Yusuke SUETSUGU, Ken-ichi KANAZAWA, Shigeki KATO, Kyo SHIBATA, Hiromi ...
    2006 年 49 巻 12 号 p. 739-747
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      The KEK B-Factory (KEKB) is a two-ring electron-positron collider with asymmetric energies dedicated to proving the CP violation. The vacuum system has been working satisfactorily form the beginning of commissioning in December, 1998. The maximum stored beam currents are 1.3 A for the 8 GeV electron ring (High Energy Ring, HER), and 1.8 A for the 3.5 GeV positron ring (Low Energy Ring, LER). Most of the beam ducts are made of oxygen-free copper, owing to its ability to withstand an intense heat load and to effectively shield the radiation from high beam currents. The pumping scheme is a combination of Non-Evaporable Getter (NEG) pumps and auxiliary sputter ion pumps. An average pressure of about 1×10-7 Pa has been achieved for both rings at the maximum beam currents for both rings. The coefficient of photon-stimulated gas desorption has been decreasing steadily to less than 5×10-7 molecules photon-1 at an integrated linear photon density of about 1×1026 photons m-1. Although special care was taken to make the inside of the beam ducts as smooth as possible in order to avoid the excitation of higher order modes (HOM), the presence of high-current bunched beams has created several problems so far. The intense HOM has sometimes caused the heating of components near to some big HOM sources. Electron cloud around positron bunches led to an instability, which resulted in a vertical beam size blow-up in LER. A discussion about upgrading KEKB has just started aiming at a higher luminosity. The R & D of the vacuum components has also begun based on various experiences so far.
  • June-Rong CHEN, Gao-Yu HSIUNG, Che-Kai CHAN, Tsai-Lieh YANG, Chien-Kua ...
    2006 年 49 巻 12 号 p. 748-753
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      This article describes the design and operation of the vacuum system of the 1.5 GeV Taiwan Light Source (TLS) at the National Synchrotron Radiation Research Center (NSRRC). The TLS vacuum system has aluminum beam ducts, an oil-less fabrication process, a low impedance structure, an oil-less pumping system, little dust and an effective vacuum safety interlock system. Operating already for 12 years, TLS vacuum system has been highly reliable.
      A low-emittance 3.3 GeV synchrotron light source, the Taiwan Photon Source (TPS, with a circumference of 518.4 m), at the NSRRC is proposed to meet the requirements of advanced scientific study. Given the strictness of these requirements, the TPS vacuum system must be constructed to perform well in many areas, with a low vacuum pressure, little dust, a stable mechanical structure and a low risk of material failure caused by a high heat load or radiation damage. The vacuum system of the TPS has been preliminarily designed based on experience gained at the TLS. This work presents the technical design of the TPS vacuum chambers, the pumping configuration and some special components, emphasizing the considerations in obtaining an ultrahigh vacuum, the factors that influence beam quality and the reliability of the vacuum system.
  • Dikui JIANG
    2006 年 49 巻 12 号 p. 754-756
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      SSRF is the first third generation light source in China. The storage ring vacuum system will adopt SS 316LN chambers with antechambers and discrete absorbers. Several chamber models using SS 316L were developed. There are three types of absorbers. TSP and (SIP+NEG) combined pumps will be used. A model of (SIP 2001/s+NEG WP1250) was developed. The vacuum system in total cell will be pre-baked before installing, then in-site baking will not be adopted. RF shielded bellows containing a single finger shielding structure and the high precision BPM section have been designed.
解説
研究
  • 松本 茂生, 岡本 昭夫, 野坂 俊紀
    2006 年 49 巻 12 号 p. 763-766
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      Nano-particle of Pt is essential for a fabrication of high performance catalysts. It was tried to control particle size of nano-particle of Pt by preparing platinum and carbon (Pt-C) composite thin films. Pt-C composite thin films have been deposited by plasma sputtering method using methane/argon mixture gas. The sputtering voltage varied from 100 to 1000 V, the partial pressure of the methane gas varied from 0 to 1.0×10-1 Pa, the total gas pressure of the methane and argon mixture was fixed at 1.8×10-1 Pa. A high-purity platinum metal was used as a sputtering target. The electrical property of Pt-C composite thin films can be changed from metallic to dielectric according to the preparation conditions of the sputtering voltage and the partial pressure of the methane. These composite thin films have various structures, consist of nano-scale particles of Pt crystallites. The designed catalysts of the Pt-C composite thin films comprising nano Pt particles will be possibly obtained by optimizing the partial pressure of the methane and the sputtering voltage.
  • 高澤 悟, 浮島 禎之, 谷 典明, 石橋 暁
    2006 年 49 巻 12 号 p. 767-770
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      A facing target sputtering piece of equipment was assembled to form ITO films and compare the features with those ITO films deposited using low-voltage sputtering techniques (e.g. parallel plate magnetron sputtering). The ITO films formed using the former technique showed minimum resistance at higher oxygen partial pressure regions and exhibited generally higher resistivity than those formed using parallel plate magnetron sputtering.
      To evaluate the degree of damage caused by ITO film deposition on organic films, tris (8-hydroxyquinoline) aluminum (Alq3) was vacuum deposited on glass substrates before ITO film formation, and the photoluminescence (PL) intensity of Alq3 was compared, before and after ITO deposition. ITO film deposition using parallel plate sputtering caused 56% PL decay as compared to the reference state (before ITO film deposition), and ITO deposition using the facing target sputtering caused 36% decay, indicating the latter method was less damaging to the organic film. It also emerged that eliminating the introduction of oxygen to the facing target sputtering process could substantially suppress PL decay of the Alq3 film.
  • 岩田 達夫, 吉本 智巳, 安森 偉郎, 飯田 昌盛
    2006 年 49 巻 12 号 p. 771-774
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      The electron emission mechanism of a cathode covered with carbon-based hard film is discussed in relation to thermionic electron emission. This new model can reproduce the frequently observed peculiar Fowler-Nordheim plots consisted of two distinct parts, which are a strong electric field dependent part and a very weak field dependent part. It is shown that there is a relationship between the threshold electric field and film thickness as well as the threshold electric field and anode-cathode distance. The present model requires neither special field-enhancement mechanisms nor extremely small work function but does require retarding potential at dielectric-film/vacuum interface (∼1 eV).
速報
  • 小川 修一, 高桑 雄二, 石塚 眞治, 吉越 章隆, 寺岡 有殿, 水野 善之
    2006 年 49 巻 12 号 p. 775-779
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      Nitridation at a Ti(0001)-1×1 surface using supersonic N2 molecular beams was investigated by real-time photoelectron spectroscopy to clarify the adsorption reaction dynamics of N2 molecules at the Ti surface. In a whole N2 dosage region examined, N 1s spectra could be fitted well with two chemically-shifted components A and B. The binding energies were 396.9 and 396.6 eV, respectively. For both components A and B, the initial sticking probability S0, obtained by differentiating each uptake curve of N 1s, showed a decrease feature with increasing Et as the overall trend, while had significant minima at ∼0.3 and ∼1.5 eV. Such Et dependences of S0 suggest that the chemisorbed states A and B are similarly caused by a trapping-mediated adsorption process through a physisorption state at lower Et than 0.3 eV and an activated adsorption process becomes to be dominant at higher Et than 0.3 eV. Although both components A and B can appear similarly at the initial N2 adsorption stage, the component B decreases considerably after showing a maximum. The initial increase continues, however, with changing its uptake rate for the component A, indicating a change of the nitrogen adsorption state from the component B to A with progress of nitridation.
  • 藤川 友佳, 木内 正人, 松谷 貴臣, 竹内 孝江
    2006 年 49 巻 12 号 p. 780-781
    発行日: 2006年
    公開日: 2007/08/09
    ジャーナル フリー
      We deposited transparent and electrical conductive thin films on polymer substrates ZEONOR® (cycloolefin) by oxygen ion beam induced chemical vapor deposition (IBICVD) with tetramethylstannane (TMS). The film depositions were carried out the acceleration voltage of oxygen ion beam in range from 50 to 300 eV. The deposition time was fixed at 180 minutes at all conditions. Under irradiation of 300 eV oxygen ions, the optical transmittance at 550 nm and the resistivity of the prepared film were 80% and 5.4×10-2 Ω•cm, respectively. When oxygen ion energy increased from 50 to 300 eV, root mean square of roughness and contamination of carbon were decreased.
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