真空
Online ISSN : 1880-9413
Print ISSN : 0559-8516
ISSN-L : 0559-8516
49 巻, 7 号
選択された号の論文の13件中1~13を表示しています
小特集「マイクロリアクター」
解説
一般論文
研究
  • 田中 輝光, 大城 和宣, 藤森 宏高, 栗巣 普揮, 下里 義博, 岡田 繁信, 松浦 満, 山本 節夫
    2006 年 49 巻 7 号 p. 424-429
    発行日: 2006年
    公開日: 2007/05/25
    ジャーナル フリー
      A reactive sputtering apparatus utilizing electron cyclotron resonance (ECR) was developed for the deposition of thick oxide or nitride films usable in electric devices. A high deposition rate of 44 nm/min. was achieved using a conic alloy target and the deposited soft ferrite thin films were successfully crystallized without heat treatment during film deposition. Magnetic and physical properties for the film were analyzed in terms of saturation magnetization, coercivity, uniformity of film thickness, and inner stress. Obtained properties were consistent with soft magnetic films. The result confirms the oxygen partial pressure ratio to deposition rate strongly affected the magnetic properties. Well crystallized, ultra thin 3-nm-thick Ni-Zn ferrite (100) films, were also successfully deposited on MgO (100) underlayers. These results imply the ECR sputtering method is one of the most effective deposition methods for highly crystallized polycrystalline thick and thin films. Crystal orientation was improved by low target voltage sputtering as well as a relatively low deposition rate. Further improvement is considered to be possible by deposition at lower base pressures.
速報
  • 青木 勝詔, 鈴木 恵友, 高梨 久美子, 石井 一久, B. S. SATYANARAYANA, 尾浦 憲治郎, 古田 寛, 古田 守, ...
    2006 年 49 巻 7 号 p. 430-432
    発行日: 2006年
    公開日: 2007/05/25
    ジャーナル フリー
      A novel method to make the sharp emitter tips having low threshold voltage of field emission was achieved using nanodiamond particles on conductive amorphous carbon films. A conductive tetrahedral amorphous (ta) carbon film and nano-sized diamond particles with the size of 50 to 200 nm were sequentially deposited by cathordic arc method using a glass substrate at room temperature. Tip structure with the height of 10 to 40 nm was formed by H2 plasma etching of the diamond particles/ta-C double layer film. The threshold voltage of the field emission from the tip structures formed by the H2 plasma etching was 3 V/μm that was significantly lower than 10.4 V/μm for the as-deposited diamond particles/ta-C double layer carbon film. This selective dry etching method using the nano-diamond particles could fabricate sharp and high density nano-sized diamond emitters on conductive ta-C films without any photo-masks of lithography processes.
  • Melanie DAVID, Tanglaw ROMAN, Wilson Agerico DIÑO, Hiroshi NAKA ...
    2006 年 49 巻 7 号 p. 433-436
    発行日: 2006年
    公開日: 2007/05/25
    ジャーナル フリー
      We investigate the adhesion strength of poly(butylene terephthalate) or PBT on aluminum using density functional theory-based energy calculations on periodic models. Instead of dealing with a bigger polymer system, we considered, as a first step, a small scale configuration to examine the key point of adhesion between PBT and Al surface. We placed the PBT monomer horizontally and vertically on aluminum surface. We also considered placing aluminum on top of the bulk PBT. By calculating the total energy of the system when PBT monomer approaches aluminum surface and comparing them with their energies when they are isolated, we obtain the binding energy of PBT on aluminum surface. The adhesion is stronger when the PBT monomer is oriented vertically than horizontally. Strong binding is also observed when the aluminum atom is placed on bulk PBT.
  • 寺本 拓矢, 垣谷 公徳
    2006 年 49 巻 7 号 p. 437-439
    発行日: 2006年
    公開日: 2007/05/25
    ジャーナル フリー
      We study the adsorption structures of Mg and Ba adsorbed on Si(001) surface, respectively, with the first principles calculation based on the density functional theory and the pseudo potential method. We use repeated slab models with a 2×2 unit cell and seven Si layers. In particular, we focus on atomic structure, the adsorption energy and the geometrical information of the adsorbed alkali earth metal atoms and the Si dimers on this surface. It has been found that the most stable adsorption site of the Mg/Si(001) surface is the T4 site and that of the Ba/Si(001) surface is the T3 site. The estimated interaction between the adsorbed Ba is repulsive.
  • Tanglaw ROMAN, Wilson Agerico DIÑO, Hiroshi NAKANISHI, Hideaki ...
    2006 年 49 巻 7 号 p. 440-442
    発行日: 2006年
    公開日: 2007/05/25
    ジャーナル フリー
      We discuss effects of the adsorption of glycine, histidine, phenylalanine, and cysteine on the electronic structure of the metallic (3,3) carbon nanotube through calculations within density functional theory. Results show good nanotube electronic structure stability in the presence of the biomolecules. Molecule-nanotube band mixing and band degeneracy lifting are observed, though the limited extents to which these effects are manifested on the system electronics affirm the weak, noncovalent connection at their interface.
  • 斎藤 順雄, 仲秋 勇, 岩田 弘, 杉山 治
    2006 年 49 巻 7 号 p. 443-445
    発行日: 2006年
    公開日: 2007/05/25
    ジャーナル フリー
      Thin films of Ni-Cr oxide were prepared by magnetron sputtering of NiO-Cr2O3 (1 : 1 mol ratio) target in a gas mixture of oxygen and argon. The dependence of the partial pressure ratio R of oxygen to the toal sputtering gas on the compositional, optical and electrical properties of the films was investigated from a standpoint of an application to the infrared sensor. With increasing R, the Ni(220) peak of XRD increases, the optical bandgap decreases and the dc conductivity σ as well as the thermistor coefficient Bth increases. It is found that a set of relatively high values of σ and Bth for the infrared sensor is obtained in the range of R around 10%.
  • Qiang ZHANG, Shizuyasu OCHIAI, Goro SAWA, Asao OHASHI, Kenzo KOJIMA, Y ...
    2006 年 49 巻 7 号 p. 446-448
    発行日: 2006年
    公開日: 2007/05/25
    ジャーナル フリー
      A polymer gate dielectric layer is important when making organic FET because all organic FETs require flexibility, the right weight, optical transparence and low cost. It has various applications such as organic LSI, organic logic circuits and new information tools.
      In this paper, copperphthalocyanine (CuPc), vanadylphthalocyanine (VOPc) and zincphthalocyanine (ZnPc), to represent the active layers of OFET, were deposited using vapor deposition on polycarbonate (PC) thin film and their morphologies and molecular orientations were investigated using X-ray Diffraction (XRD) spectrometer and UV/Vis spectrometer. Based on these results, the molecular orientations of CuPc, ZnPc and VOPc thin films deposited on PC thin film were shown to be perpendicular to the insulating thin film of the PC thin film.
feedback
Top