巻号一覧
49 巻, 8 号
選択された号の論文の7件中1～7を表示しています
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小特集 1「真空作成の最前線」
解説
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齊藤 芳男2006 年 49 巻 8 号 p. 453-459
発行日: 2006年
公開日: 2007/06/08
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澤田 雅, 大林 哲郎2006 年 49 巻 8 号 p. 460-465
発行日: 2006年
公開日: 2007/06/08
ジャーナル フリーSince almost all commercially provided dry pumps are of the positive displacement type, the leak flow through clearance between displacement chambers in the pump is a dominant factor which determines pumping performance. Prediction methods for the pumping performance of dry pumps are explained by comparing it to the scroll pump and the screw pump. The scroll pump has long clearances, but the screw pump has relatively short ones, and the volume of the chambers reduces from the inlet toward the outlet in the scroll pump, but that in the screw pump is kept constant throughout the pumping process. Such a structural difference produces a small difference in the way of treating leak flow. These two methods can be applied to the other dry pumps requiring only minor modification.
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尾高 憲二2006 年 49 巻 8 号 p. 466-469
発行日: 2006年
公開日: 2007/06/08
ジャーナル フリーTurbomolecular pumps (TMPs) are fully grown products. There are four points to say so. First, hydrodynamic designing method is well established because there is no change in the pumping speed in the last ten years. Second, ultimate pressures of the order of 10−10 Pa are achieved. This corresponds to the lowest outgassing rate developed for metals. Third, they have extended operating range to pressures as high as 100 Pa with combination of turbo-drag pumps. Fourth, TMPs with electro-magnetic bearings produce perfectly clean vacuum with clean roughing pumps. For further development TMPs might focus on special usages.
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小特集 2「排気やコンダクタンスに関する希薄気体の流れの計算科学」
解説
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松本 洋一郎, 山口 浩樹2006 年 49 巻 8 号 p. 470-475
発行日: 2006年
公開日: 2007/06/08
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松井 純2006 年 49 巻 8 号 p. 476-480
発行日: 2006年
公開日: 2007/06/08
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研究
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杉元 宏2006 年 49 巻 8 号 p. 481-487
発行日: 2006年
公開日: 2007/06/08
ジャーナル フリーSteady gas flows in a vacuum pump driven by thermal edge flow, which is proposed in Rarefied Gas Dynamics, AIP, New York, 138-141 (2002), are investigated numerically for various Knudsen numbers by the direct simulation Monte Carlo (DSMC) method based on the Boltzmann equation for a hard-sphere gas. The data of the maximum mass flow rate, energy consumption rate, and the maximum compression ratio of the pump is presented with some additional results on the effect of geometry and temperature ratio in the pump unit.
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山本 恭二, 谷脇 充浩, 武内 秀樹, 百武 徹2006 年 49 巻 8 号 p. 488-492
発行日: 2006年
公開日: 2007/06/08
ジャーナル フリーEffects of surface grooves on the rarefied gas flow through a channel are investigated numerically using the linearized B-G-K equation. One wall of the channel has rectangular grooves engraved periodically parallel or normal to the flow direction, and the other wall is flat. Couette and Poiseuille flows are analyzed. It is shown that in case of normal grooves, the flux through the channel has a minimum when the depth of the groove is about half of its width. For parallel grooves, the flux is considerably low compared with that of the smooth walls of the channel when the groove width and pitch are comparatively smaller than the channel width.
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