巻号一覧
50 巻, 4 号
選択された号の論文の15件中1～15を表示しています
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小特集 1「真空を利用した分析器―質量分析計」
序論
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高橋 直樹2007 年 50 巻 4 号 p. 227
発行日: 2007年
公開日: 2008/01/01
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解説
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稲吉 さかえ2007 年 50 巻 4 号 p. 228-233
発行日: 2007年
公開日: 2008/01/01
ジャーナル フリーThermal desorption spectroscopy (TDS) has been commonly employed to evaluate the outgassing properties of both vacuum materials and thin films. Hydrogen, water, CO and CO2 —the most dominant gas species— can be easily detected and quantified by quadrupole mass spectrometry. This paper examines two calibration methods to convert ion current into outgassing rate: first, by using the standard leak of each gas and, second, by using an absolute pressure gauge. TDS is demonstrated for two different types of samples: stainless steel and amorphous Si (a-Si) film. In the case of stainless steel, samples blasted with glass beads were compared with chemically polished samples, and the TDS results' relationship to pumping down properties was investigated. The a-Si film examined was formed using a low temperature poly silicon process. Its hydrogen concentration as determined by TDS corresponded with that obtained by secondary ion mass spectrometry (SIMS). The outgassing temperature characteristics obtained for both the stainless steel and a-Si samples provided valuable information.
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塩川 善郎, 中村 恵, 丸山 はる美, 平野 芳樹, 種田 康之, 井上 雅子2007 年 50 巻 4 号 p. 234-240
発行日: 2007年
公開日: 2008/01/01
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松本 淳, 三澤 健太郎, 石内 俊一, 鈴木 哲也, 林 俊一, 藤井 正明2007 年 50 巻 4 号 p. 241-245
発行日: 2007年
公開日: 2008/01/01
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豊田 岐聡2007 年 50 巻 4 号 p. 246-251
発行日: 2007年
公開日: 2008/01/01
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青柳 里果2007 年 50 巻 4 号 p. 252-257
発行日: 2007年
公開日: 2008/01/01
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技術資料
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大村 孝幸, 山口 晴久2007 年 50 巻 4 号 p. 258-263
発行日: 2007年
公開日: 2008/01/01
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小特集 2「制限された場における水」
解説
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松田 和之, 真庭 豊2007 年 50 巻 4 号 p. 264-269
発行日: 2007年
公開日: 2008/01/01
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紅谷 篤史, 吉信 淳2007 年 50 巻 4 号 p. 270-275
発行日: 2007年
公開日: 2008/01/01
ジャーナル フリーThe interaction of water with solid surfaces plays a crucial role in many areas, e.g., heterogeneous catalysis, electrochemistry, solar energy conversion, and corrosion chemistry. In order to understand microscopic mechanisms in these phenomena, it is important to elucidate how water molecules adsorb, behave, and arrange on metal surfaces. So far, there are many reports concerning the first layer of water on transition metal surfaces. Recently, more detailed microscopic pictures have been obtained from both experiments using synchrotron radiation, scanning tunneling microscopy, etc., and first principles calculations. In this paper, we review the studies about the first layer of water on transition metal surfaces, including our recent study of water on Rh(111).
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灘 浩樹2007 年 50 巻 4 号 p. 276-281
発行日: 2007年
公開日: 2008/01/01
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渡部 直樹, 香内 晃, 毛利 織絵, 長岡 明宏, 日高 宏2007 年 50 巻 4 号 p. 282-290
発行日: 2007年
公開日: 2008/01/01
ジャーナル フリーSurface reaction on interstellar ice grains is a key process for the chemical evolution in molecular clouds. We have performed a series of experiments to simulate the chemical evolution of the primordial CO molecule on the ice grains. Photochemical and hydrogen atom reactions of CO-H2O binary ice at 15 K were studied because those are anticipated to be the most dominant chemical processes on the surface of grains. It was found that the photochemical reactions produce CO2 with the highest yield, HCOOH, H2CO, CH3OH, and so on and that even at very low temperatures (much lower than activation energies), addition reactions of hydrogen atoms to CO proceed efficiently due to the tunneling effect and produce H2CO and CH3OH. Branching ratio of the yields in photochemical reactions strongly depends on the structure of ice, while hydrogen atom reactions are very sensitive to both the structure and temperature of ice. Considering the physical and chemical conditions of molecular clouds, the experimental results are consistent with the astronomical observation of ice grains.
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一般論文
速報
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中野 武雄, 星 堅一郎, 馬場 茂2007 年 50 巻 4 号 p. 291-293
発行日: 2007年
公開日: 2008/01/01
ジャーナル フリーThe effect of background gas environment on the purity of reactively-deposited nitride films has been studied. Especially, the relation between the oxygen background pressure and its incorporation into the TiN film is investigated in this study. We have developed a UHV sputtering system and deposited TiN films under two different base pressure conditions: one was a UHV condition less than 10-6 Pa, and the other was 1×10-4 Pa of oxygen. The oxygen content of the films was examined with X-ray photoelectron spectroscopy. While no trace of oxygen was detected in the TiN film deposited under the UHV condition, 10 at.% of oxygen was observed in that deposited with the O2 introduction. The extent of O2 incorporation into the TiN film is discussed based on the difference in sticking characteristics of oxygen and nitrogen on the titanium surface.
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岡山 勇太, 村岡 裕紀, 小埜 芳和, 小林 佑司, 川畑 敬志2007 年 50 巻 4 号 p. 294-296
発行日: 2007年
公開日: 2008/01/01
ジャーナル フリーA radio-frequency (RF) sputtering system with multipolar magnets around a magnetic Ni (200-mm diameter, 8-mm thick) target has been developed. In this study, an S-pole magnet was added at the back side of the target to enhance the surface magnetic flux density at the central region of the target. By the introduction of the S-pole magnet, it is shown that the surface magnetic flux density 2 mm above the target increases up to 3.5 times in this region. It is also revealed that the new system can sustain the discharge at a lower Ar gas pressure down to 2.6×10-1 Pa.
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鷺坂 圭亮, 高木 祥示, 後藤 哲二2007 年 50 巻 4 号 p. 297-300
発行日: 2007年
公開日: 2008/01/01
ジャーナル フリーAdsorption of methanol to the cleaved MgO(001)surface is studied using electron stimulated desorption (ESD) technique. CH2+, CO+ and CH3OH+ are identified as the desorbed ions originated to methanol. However, the yield of these ESD ions is few compared to OH+ in water adsorption for the sample just after cleavage in methanol. The yield of ESD ions from the adsorbed methanol is increased by immersion in methanol for 6 hours. By mixing water into methanol, the yield of ESD ions increases in the sample just after cleavage. From the results of electron stimulated desorption ion angular distribution (ESDIAD), it is found that the CH2+ and CO+ desorb from the step site and the CH3OH+ ions desorb from the step and terrace sites.
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深澤 優子, 光原 圭, 越智 健太, 松本 雄吾, 塩見 祐樹, 鈴木 康文2007 年 50 巻 4 号 p. 301-304
発行日: 2007年
公開日: 2008/01/01
ジャーナル フリーEnergy loss spectra and angular distributions of 610 keV protons scattered on the (001) surfaces of the ion crystals are measured. The angle of incidence of protons is smaller than 13 mrad. The surfaces have been in-situ irradiated uniformly and the other nonuniformly so that its upstream side for the incident protons is removed preferentially. The surface damages created by the irradiation are observed by an atomic force microscopy (AFM) in air. With increasing the irradiation dose, the energy losses and the peak angles of scattering of the scattered protons are plotted. The results depend largely on the distribution of damages, and are compared with calculated results by a computer simulation. It is found that the change of the angular distributions depends not only on the distribution of damages but also on the angle of incidence of protons to the surface.
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