Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
53 巻 , 8 号
選択された号の論文の7件中1~7を表示しています
小特集「スパッタリングをめぐる技術2」
解説
一般論文
解説
  • Michael HAHN
    原稿種別: Review
    2010 年 53 巻 8 号 p. 493-496
    発行日: 2010年
    公開日: 2010/09/15
    ジャーナル フリー
      A large majority of insertion device (ID) vacuum sectors on the European Synchrotron Radiation Facility (ESRF) electron storage ring for the production of intense synchrotron radiation are equipped with flat vacuum vessels made of extruded aluminum using a non-evaporable Getter (NEG) coating to reduce the vacuum pressure bump along the chamber during the operation of the accelerator. After the in-situ activation of the sputtered film by bake-out of the vacuum system the NEG pumps gases such as H2, CO and CO2 while CH4 and noble gases are not pumped. Because a low activation temperature for the NEG is necessary to be compatible with the mechanical limitations of the aluminum alloy, the NEG composition of TiZrV has been chosen. During operation of the ESRF electron storage ring a few hundreds of watts of synchrotron radiation fall on the walls of the ID chambers leading to photodesorption and photo-conditioning. The NEG coating is intended to provide distributed pumping and reduced photodesorption to keep the generation of unwanted Bremsstrahlung radiation following the installation of a new vessel low. The deposit of the NEG coating takes place at a dedicated facility in the ESRF.
速報
  • Toshinori WATANABE, Yuji NOBUTA, Yuji YAMAUCHI, Tomoaki HINO, Yoshihir ...
    原稿種別: Review
    2010 年 53 巻 8 号 p. 497-500
    発行日: 2010年
    公開日: 2010/09/15
    ジャーナル フリー
      When it was soaked, more were desorbed
      In this study, gas desorption behaviors of graphite anode samples after various surface treatments and electrolyte solvent adsorption properties were investigated. The total amount of desorbed gases for the natural graphite samples increased after soaking in propylene carbonate, and increased even further with Raman R value, suggesting that surface defects act as an effective adsorption site for the electrolyte. These findings indicate that surface treatment such as a coating might be an effective remedy to reduce the amount of desorption gases in natural graphite samples. It was also found that the total amount of gas desorption largely decreased with the coating with polymer resin and subsequent heat treatment at 423 K for 12 hours in a medium of air. It is likely that the dominant gas species present in the natural graphite after the electrolyte soaking are dependent on the binding energy and the molecular structure of the electrolyte solvent.
  • 浅地 豊久, 鍋澤 浩文, 内山 英史, 安部 隆
    原稿種別: 速報
    2010 年 53 巻 8 号 p. 501-503
    発行日: 2010年
    公開日: 2010/09/15
    ジャーナル フリー
      Lithium niobate (LN) etching has been demonstrated with an electron cyclotron resonance (ECR) plasma and low-frequency bias. The etching was studied by using Ar, BCl3 and SF6 gases. The etch rates of BCl3 and SF6 are about 3.8 and 4.6 times higher than that of Ar, respectively. The highest etch rate (220 nm/min) was obtained under the condition of SF6 plasma and 1 MHz bias. The etching method which can fabricate micro-trenches with high-aspect ratio and smooth surfaces has been achieved.
随想
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