In the field of nuclear fusion technology, Er
2O
3 thin film is a candidate for the coating material of the blanket of thermonuclear fusion reactor. It is known that the luminescence of Er
2O
3 provides information on its crystallinity. We observed luminescence of Er
2O
3 during the irradiation with highly charged ions produced by an electron beam ion source (EBIS) as a function of charge state and kinetic energy of incident Ar ions. We found that the luminescence intensity non-linearly rises as the charge state increases and is independent of kinetic energy. This demonstrates that the luminescence of Er
2O
3 thin film arises from the potential energy of highly charged ions rather than the kinetic energy.
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