Journal of the Vacuum Society of Japan
Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398
58 巻 , 8 号
選択された号の論文の9件中1~9を表示しています
小特集 1「真空基礎講座 2015」
講座
  • 市村 正也
    2015 年 58 巻 8 号 p. 273-281
    発行日: 2015年
    公開日: 2015/09/04
    ジャーナル フリー
      The purpose of this article is to provide an introduction to vacuum science and technology for absolute beginners. The kinetic theory of gases is briefly described in the initial introductory part. The body of this article is divided into three parts. The first part deals with vacuum pumps. The operation principles are explained for several popular types of vacuum pumps. The second part deals with vacuum gauges. The operations of commonly used vacuum gauges are discussed. The third one deals with vacuum-tight connection with tubes and flanges. Throughout the text, basic concepts and technical terms are explained so that the text can be easily understood even by very beginners. Caution points for using vacuum systems are also given.
  • 板倉 明子
    2015 年 58 巻 8 号 p. 282-291
    発行日: 2015年
    公開日: 2015/09/04
    ジャーナル フリー
      The vacuum components are important components to be used at the boundary of the atmosphere and vacuum, because a vacuum system is not assembled just with the vacuum vessel and the vacuum pumps.
      The basic technique is a vacuum sealing technique of how to prevent leakage of the atmosphere. I explain vacuum seal technology and vacuum parts as applied technology, flanges, valves, vacuum current feedthrough, and the optical window. Movable mechanisms in vacuum are described, too.
  • 高橋 主人
    2015 年 58 巻 8 号 p. 292-298
    発行日: 2015年
    公開日: 2015/09/04
    ジャーナル フリー
      An evacuation process from atmospheric pressure to an extremely low pressure involves four stages: removal of volume gas in a vacuum chamber, outgassing of gas adsorbed on the chamber surface, release of gas diffused to the surface from the inside of the chamber wall, and release of hydrogen gas permeated through the chamber wall. These stages are explained numerically to help understand the evacuation process. Mathematical descriptions of pumping time at the first stage of evacuation are presented using a tube between a vacuum chamber and a vacuum pump and also without using a tube. The tube can be ignored in the design of a vacuum system if its conductance is large. This will help readers in designing a vacuum system according to their own conditions.
  • 松本 益明, 祐延 悟
    2015 年 58 巻 8 号 p. 299-305
    発行日: 2015年
    公開日: 2015/09/04
    ジャーナル フリー
      In this lecture, calculation of the transmission probability of gas molecule through the vacuum pipe by Monte-Carlo simulation is presented. The basic concepts, the computational method of the distribution of scattering angle that follows the cosine law from the homogeneous random distribution and the flow chart of program are shown. The results by Monte-Carlo simulation for the simple cylindrical pipes with various length/diameter (L/D) ratios are compared with those obtained by the approximation formulas and the analytical results. The effect of specular reflection rate in the scattering at the surface of pipe is also presented.
小特集 2「VACUUM2015 真空展」
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