Electron energy-loss spectroscopy (EELS) is applied for evaluations of the dielectric properties of materials. The intensity distribution of an EELS spectrum can be interpreted as a result of dielectric response due to Coulomb interactions between incident electrons and the valence electrons in a solid. To evaluate the optical/dielectric properties of functional materials, it is important to understand the dielectric functions of the materials. In this article, the dielectric analysis using EELS is presented. First, the meaning of the dielectric function would be explained by using fundamental electromagnetic equations. After that, EELS analysis of dielectric properties of heat-shielding materials, LaB6 and Cs0.33WO3 (CWO), are presented as practical examples. From the dielectric function of LaB6 derived from EELS measurement, the properties of carrier electrons can be investigated. In the study of the dielectric properties on CWO, angled-resolved EELS (AR-EELS) measurement is conducted to investigate the anisotropic properties of plasmon oscillations of carrier electrons. AR-EELS can provide the dielectric information similar to the polarized optical measurement. Moreover, the momentum transfer dependence of the plasmon energies should reflect the conduction band structure of CWO. Therefore, AR-EELS is expected to analyze the band structure of metallic functional materials.
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