The half-width of diffraction line profile is widely used to evaluate the broadness of a diffraction line. To evaluate the reproducibility in measurements of the half-width B, the standard deviation of half-width, σ
B, arising from counting statistics is derived analytically. It can be calculated from a single measurement. An approximate value of σ
B is given by σ
B=√(2y
m+3y
4))/(√3M) where y
4 is the maximum count, and y
m and M are the X
ray counts and the slope of the side of the diffraction line at half its height, respectively. This equation shows that σ
B depends only on X
ray counts and the slope at half height of the diffraction line, being independent of the half-width. Additionally, σ
B is inversely proportional to the square roots of X
ray counts and preset time.
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