The composition and the structure of plasma-polymerized tetrafluoroethylene (PPTFE) in thin film, which was formed in the glow region, were investigated by means of X-ray photoelectron spectroscopy (XPS). The ratio of fluorine to carbon (F/C) in the PPTFE was determined to be 1. 42 by use of intensities of the F
18 and C
18 spectra. The curve resolution of the broad signal for C
18. resulted in five kinds of peaks with different C
18, electron binding energies : 284. ± 0. 4, 287. 0± 0.3, 289. 0± 0.2, 291.5± 0.2, and 293.6± 0.1 eV. In order to assign the C
18 spectra, the Cls energy shifts (ΔE (C
18)) for the specified carbon atoms of several model compounds were estimated by using (i) an electrostatic potential model based on the CNDO/2 calculation of the atomic charges and (ii) an electronegativity parameter method. An empirical equation concerning the increment of C
18 electron binding energy due to fluorine substitution was derived from the theoretical calculation. By reference to this empirical equation, it was confirmed that the PPTFE includes highly branched and cross-linked segments.
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