Effects of Ar and Ne diluents on the output power of Xecl lasers are experimentally studied for the Xe CI lasers transversely excited byashort-pulse (40 ns) electron-beam. We used many gas mixtures: Ar, Ar/HCl, Ar/F
2, Ne, Ne/HCl and N
2, to precisely measure the electron-beam energy deposited into the laser gas mixtures. According to the measurement, it is verified that the deposition energy measured in a pure rare-gas and a mixture of rare-gas and halogen gas gives always less energy than the value converted from the energy deposited in the pure N
2, because of the considerable spontaneous emission loss in the related rare-gas mixtures. The value converted from the N
2 is found rather correct. For a 2-atm mixture of Ar, Xe, and HCl pumped with an excitation rate of 0.95MW/cm
3 ·atm, the intrinsic efficiency is 3.3%, while it is 2.5% for a 3-atm mixture of Ne, Xe, and HCI pumped with a rate of 0.60MW/cm
3 ·atm.
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