巻号一覧
30 巻, 5 号
選択された号の論文の8件中1～8を表示しています
- |<
- <
- 1
- >
- >|
「フェムト秒レーザーによる無機材料の微細加工」解説小特集号
解説小特集
レーザー解説
-
鷲尾 邦彦2002 年 30 巻 5 号 p. 220
発行日: 2002/05/15
公開日: 2009/10/21
ジャーナル フリーPDF形式でダウンロード (132K) -
Andreas OSTENDORF2002 年 30 巻 5 号 p. 221-225
発行日: 2002/05/15
公開日: 2009/10/21
ジャーナル フリーFemtosecond (fs) lasers are perfect laser sources for material processing when highest accuracy and smallest structure sizes are required. Due to the ultrashort interaction time and the high peak power the process is generally characterized by the absence of heat diffusion and, consequently, molten layers. Moreover, the process is nearly independent of the material and recent results demonstrate the possibility to ablate material with sub-μm accuracy or even nm dimension while maintaining an outstanding reproducibility. Also, certain technically important materials like metals with high heat conductivity, semiconductors, and dielectrics with high transparency in the visible and uv can be processed by fs laser pulses which have been unable to machine so far with conventional laser radiation. In contrast to longer laser pulses, the absorption and ablation process can be described in a more simple way resulting in a higher reproducibility and controlability of the process.
Besides the microelectronics industry there are numerous potential applications in the field of automotive supplier industry, medicine technology and finally telecommunication.抄録全体を表示PDF形式でダウンロード (1629K) -
杉岡 幸次2002 年 30 巻 5 号 p. 226-232
発行日: 2002/05/15
公開日: 2009/10/21
ジャーナル フリーBoth of DUV/VUV and femtosecond lasers are expected as novel tools for materials processing for the next generation. DUV/VUV laser is good at surface micropatterning and surface shaping, while femtosecond laser is suitable for internal modification of transparent materials as well as micro-hole drilling, cutting and high aspect ratio machining. In this paper, precison microfabrication of dielectrics and semiconductors using DUV/VUV and femtosecond lasers are reviewed, and features of each laser processing are compared.抄録全体を表示PDF形式でダウンロード (2393K) -
邱 建栄, 平尾 一之2002 年 30 巻 5 号 p. 233-238
発行日: 2002/05/15
公開日: 2009/10/21
ジャーナル フリーFemtosecond laser is a powerful tool to make 3-dimensional microscopic modifications in transparent materials due to its ultrashort laser pulse and ultrahigh strength of electric field. In this paper, we report on femtosecond laser-induced microstructures and novel optical functions of transparent materials. We demonstrated space-selective introduction of microcrack, manipulation of defect and valence state of active ions, formation of optical waveguide array and micrograting inside glasses by a 800 nm femtosecond laser.抄録全体を表示PDF形式でダウンロード (2221K) -
三澤 弘明2002 年 30 巻 5 号 p. 239-243
発行日: 2002/05/15
公開日: 2009/10/21
ジャーナル フリーFunctionalization of dielectric materials such as crystals, glasses (silica-related or polymers), and liquid polymerizable resins by femtosecond (100-500 fs) irradiation is summarized. The modification was carried out by employing tight focusing optics with numerical aperture typically NA > 0.6. This allows to produce 3D optical memory and photonic crystals (PhC) by implementing a principle of the focal spot scanning inside silica glass or polymerizable resin. PhCs can be also fabricated by encoding the 3D hologram in negative polymer photoresist. Optically modified regions of dielectric were found to respond sensitively to wet etching. The contrast in the etching rate is over 50, which makes it possible to fabricate 3D channels for microfluidics inside dielectrics.抄録全体を表示PDF形式でダウンロード (635K) -
河村 賢一, 平野 正浩, 細野 秀雄2002 年 30 巻 5 号 p. 244-250
発行日: 2002/05/15
公開日: 2009/10/21
ジャーナル フリーThis paper describes the nanomachining of inorganic materials by two-beam holographic method using high peak power infrared femtosecond laser pulses. Micro-grating structures can be holographically encoded in any type of materials by colliding a pair of pulses split from a single femtosecond laser pulse. We also describe the periodic nano-structure array in crossed holographic gratings on silica glass by two femtosecond laser pulses. A variety of periodic nano-structures from a one-dimensional wire array to two-dimensional arrays of hole or island were formed by changing the energy density and the incident angle of the irradiation laser beams.抄録全体を表示PDF形式でダウンロード (1322K)
レーザーオリジナル
-
Hikaru KOUTA, Yutaka URINO, Tadahiko HANADA, Kazuyuki HIRAO2002 年 30 巻 5 号 p. 251-254
発行日: 2002/05/15
公開日: 2009/10/21
ジャーナル フリーReported here is the use of the focused beam of an infrared ultrashort pulse laser (150 femtoseconds pulse width, 200 kHz repetition rate, 800 nm wavelength, and 100 μm/s scanning speed) to increase the refractive index of a germanium-doped silica-glass planar waveguide. The increase obtained, Δn, itself increases in proportion to increases in the laser intensity of the surface irradiation, and it saturates to 1.6 ∼ 1.8 × 10-3 at 2.2 TW/cm2, without producing any increase in insertion loss and birefringence. Further, no decay in the refractive index change is observed after annealing at 200 °C for 10 hours. Results show that ultrashort pulse lasers are more suitable than UV lasers as light sources for highly stable adjustment of the optical lengths of waveguide devices.抄録全体を表示PDF形式でダウンロード (143K)
一般論文
レーザーオリジナル
-
岩井 克全, 阿部 由起雄, 石 芸尉, 松浦 祐司, 宮城 光信, 大石 純子, 岡上 吉秀2002 年 30 巻 5 号 p. 255-258
発行日: 2002/05/15
公開日: 2009/10/21
ジャーナル フリーA new method is proposed to fabricate infrared polymer-coated silver hollow fibers with high mechanical strength. Two kinds of polymer are used as a protective polymer to the inner wall of silica capillary glass pipe and a dielectric layer to a silver layer, respectively. Mechanical and transmission properties of the hollow fibers have been discussed.抄録全体を表示PDF形式でダウンロード (228K)
- |<
- <
- 1
- >
- >|