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Masayoshi ESASHI
2005 Volume 33 Issue 11 Pages
715
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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Kazuhiro HANE
2005 Volume 33 Issue 11 Pages
716-720
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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Optical devices using sub-wavelength period gratings were designed and fabricated by micromachining. The gratings were patterned by electron beam lithography. Using a guided mode resonant grating of solid dye polymer film, a surface emitting micro-laser was demonstrated. Based on those results, a self-sustained guided mode resonant grating was proposed for a tunable optical filter/amplifier. Combining the grating with a comb micro-actuator, the period of the grating varied by 15%. The optical properties of the tunable grating were measured.
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Hiroshi TOSHIYOSHI
2005 Volume 33 Issue 11 Pages
721-726
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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This paper reviews the recent research and development of optical MEMS devices for fiber optic applications using the examples from the author's own. Although no small attention has been paid in particular for crossconnect of large input and output port count for these years, optical fiber network has more rooms of practical use of the MEMS technology in the small-scale fiber components such as optical aligning mechanism, fiber dispersion compensator, and variable optical attenuator. Up-to-date optical MEMS research topics are also presented such as the combination of the photonic band-gap crystal waveguides with micromechanical optical modulators.
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Masaya HORINO, Teruhisa AKASHI, Atsushi KAZAMA
2005 Volume 33 Issue 11 Pages
727-731
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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A 35×35 MEMS-based optical matrix switch suitable for optical-telecommunication was developed. Its structural feature and optical characteristics are reported. An optical beam is reflected by 4 MEMS-based micro-mirrors, and insertion loss of the switch was in a range from 1.5 dB to 1.9 dB.
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Renshi SAWADA, Eiji HIGURASHI
2005 Volume 33 Issue 11 Pages
732-738
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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Integrated optical microsensors based on photolithography were developed in the early 1990s. Since then, sensors that make the most of the intrinsic properties of laser diodes have been developed. A marriage of micromachining and opto-electronics is expected to create tremendous new opportunities for applications. This article introduces various laser-based microsensors that can be incorporated into a small actuator fabricated by micromachining technologies, and laser-based sensors using microstructural elements (microbeans, microspheres, and microtips).
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Takahito ONO, Kentaro IWAMI, Kenya GOTO, Masayoshi ESASHI
2005 Volume 33 Issue 11 Pages
739-744
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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Recent progress of microelecromechanical system (MEMS) technology enable us to fabricate precise structures and integrate various components. Using this technology, near-field optical sources are fabricated for imaging, spectroscopy and future high-density data storage. An apertured microprobe with a cantilever is integrated at the end of optical fiber. A bow-tie near-filed optical probe with an integrated electrostatic actuator for enhancing the intensity of near-field due to the plasmon resonance effect is studied for imaging. Nearfield high-density data storage device is proposed, and sub-wavelength periodic structure is fabricated for increasing the efficiency to create localized optical field. To miniaturize this data-storage device, miniature XYZ stage is fabricated and demonstrated.
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Makoto KATAYAMA, Takayuki SHIMAZU, Tomohiko KANIE
2005 Volume 33 Issue 11 Pages
745-749
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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We propose multichannel optical components based on Planar Lightwave Circuits and MEMS technologies for application to Optical Add Drop Multiplexers in Wavelength Division Multiplexed transmission systems. A 12 channel optical switch array and variable optical attenuator array have been successfully developed by integrating 2×2 cross type waveguides and MEMS micro-mirrors connected together by flip chip bonding. In this report, We will show the schematics and mechanism of the system, design and fabrication techniques, some typical optical characteristics, and some reliability tests results.
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Shin-ichiro WATANABE, Masayoshi ESASHI
2005 Volume 33 Issue 11 Pages
750-753
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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We developed an array of shutter-type multi-channel variable optical attenuators (VOA) for Dense Wavelength Division Multiplexing (DWDM) based on high-aspect-ratio electrostatic comb drive actuator fabricated by silicon bulk micromachining. Applying a voltage between the driving comb fingers and the fixed comb fingers results in the displacement of the driving comb fingers by an attractive electrostatic force The VOA achieves large attenuation dynamic range of up to 55 dB with drive voltage of 65 V and shows the insertion loss of less than 0.1 dB, the return loss of 51.6 dB for a 3-dB attenuation and the Polarization Dependent Loss (PDL) of 0.2 dB for a 3-dB attenuation.
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Yoichi HAGA, Hiromasa AKAHORI, Kentaro TOTSU, Hiroshi WADA, Masayoshi ...
2005 Volume 33 Issue 11 Pages
754-760
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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Several optical MEMS devices have been developed for minimally invasive diagnosis and therapy. Micro MEMS scanners have been developed for new endoscopes which enable high resolution inspection in the human body using a confocal microscopicsystem or optical coherence tomography. For realizing precis elaser treatment in the human body, a two-dimensional laser scanning micro tool has been also developed. Fiber-optic sensors have been developed for mechanical sensing, for example, local pressure or forces in the human body. Micro-mechanical sensing structures are fabricated using the MEMS process and installed at the tip of the optical fiber. This paper reviews optical MEMS devices developed for minimally invasive diagnosis and therapy.
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Eiji HIGURASHI, Renshi SAWADA
2005 Volume 33 Issue 11 Pages
761-765
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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Laser-driven assembly and angular alignment of micro-components (micro-lens and micro-prisms) have been demonstrated. This optically induced angular alignment results from the transfer of the angular momentum of the laser light due to the photon spin produced by the birefringence of the trapped micro-components. The fabricated components (retardation=0.76λ) were made to align at desired angular positions by changing the direction of the vibration plane of the incident light. Continuous rotation was also possible by using a circularly polarized laser beam. Signal light control using optically driven micro-phase plate has also been demonstrated.
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Hiroshi OBI, Toshio YAMANOI, Hiroyuki FUJITA, Hiroshi TOSHIYOSHI
2005 Volume 33 Issue 11 Pages
766-771
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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A new design of vertical-comb (VC) actuators has been developed to suppress in-plane electrostatic pull-in motion. VC with off-centered electrostatic combs has been found to expand the stable range in the tilt-voltag ecurves; the effectiveness has been examined by numerical simulation using ARCHITECT ®. We also have designed a fiber optic variable attenuator and experimentally confirmed the use of off-centered vertical combdrive actuator.
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Estimation of Irradiated Conditions by Combined Method of GA and NN
Takaharu KURODA, Takehiro WATANABE
2005 Volume 33 Issue 11 Pages
772-776
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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In this paper, a new hybrid technique for estimation of irradiation parameters is proposed. Micromachining of silicon using the fourth-harmonic wavelength (λ=266nm, τ=6ns) of a pulsed Nd: YAG laser beam is investigated. The silicon workpiece is irradiated while under flowing water. Based on their conditions such as the pulse energy, the focal point and the number of irradiated shots, the ablated shape and dimensions of the resulting holes are considered. First, an estimated model of the resulting shapes with the irradiation parameters are constructed by neural network. The relationship between the irradiation parameters and the resulting shapes becomes clear by using the neural network model. Furthermore, a hybrid method of a genetic algorithm and neural network to estimate the irradiation parameters for realization of any required shape is possible.
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Qin SHU, Tetsuma SAKURAI, Masahiro UEDA
2005 Volume 33 Issue 11 Pages
777-779
Published: November 15, 2005
Released on J-STAGE: March 26, 2014
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A simple optical method has been developed for measuring the degree of cross-linking of enamel coated on a copper wire, which determines the dielectric-physical properties of the wire, e. g., the dielectric dissipation factor Tanδ and glass-transition temperature
Tg. An increase in the degree of cross-linking changes the enamel color from light yellow to dark brown, which is the basis for the measurement. A preliminary experiment using samples with various degrees of cross-linking showed that the accuracy of the measurement was within an error of 5%.
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