A transparent, hard silica glass (SiO
2) layer was formed on a conventional protective coat made of
silicone ([SiO(CH
3)
2]n) on a polycarbonate plate by the 157 nm F
2 laser-induced photochemical
modification of silicone into SiO
2. An optimum laser irradiation time of the F
2 laser was found to form a
crack-free SiO
2 layer. The high optical transparency of the samples in the visible light region remained
unchanged after the F
2 laser irradiation. In the Taber abrasion test, the SiO
2 layer markedly reduced the
number of scratches, resulting in a low haze value. The haze values of the samples also depend on the
thickness of the silicone protective coat underneath the SiO
2 protective layer. As a result, the difference
of haze value [δ Hz] was successfully reduced to 1.2%, compared with these of the nonirradiated sample
and a bare polycarbonate plate of approximately 3.5 and 46%, respectively, which is comparable to the
case of a bare silica glass of approximately 0.9%.
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