The production of highly charged ions of nitrogen, argon, and carbon by a simple electron beam ion source has been described. Fully stripped ions,
13C
6+ and
15N
7+, can be obtained with -10
2 counts/sec, and Ar
12+ ions with -10
4 counts/sec, under the base pressure lower than -1×10
-8 Torr.
抄録全体を表示