Fe
1−xMn
x sputtered alloy films made under several Ar gas pressures, P
Ar’s, have been investigated by X-ray diffraction measurements. The single
bcc phase region extends up to about
x=0.2 independently of P
Ar. However, in the Fe
1−xMn
x sputtered alloy films made under low P
Ar the
bcc phase shows a larger lattice constant than that in the Fe–Mn bulk alloys, while in the films made under high P
Ar the
bcc phase shows almost the same lattice constant as that in the bulk alloys. After being annealed at 470 K for two hours, the metastable
bcc phase is still preserved being accompanied with a structural relaxation. After being annealed at 670 K for two hours, on the other hand, a phase separation into the thermally equilibrium
bcc and
fcc phases takes place, probably because the atomic diffusion at low temperatures is enhanced by a large amount of lattice defects contained in the Fe
1−xMn
x sputtered alloy films.
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