Porous silica membrane was modified with phenyltriethoxysilane and was used to separate N
2-CO
2 and N
2-CO
2-H
2O mixtures. The experiment of the separation for N
2-CO
2 mixture, the separation factor for CO
2 (α CO
2/N
2) was 0.9 in the case of using porous silica membrane (S membrane), however, when the silica membrane modified with phenyl silane coupling reagents (SC membrane) was used, the highest separation factor for CO
2 (α CO
2/N
2) reached 1.19. This was due to the fact that the phenyl group modified the surface of porous, and increased affinity of CO
2. So, CO
2 was easy to condense on the surface of porous, and N
2 become difficult to permeate. For this reason, the separation factor for CO
2 can be improved. Further, the experiment of SC membrane in the separation for N
2-CO
2-H
2O mixture, the highest separation factor for CO
2 (α CO
2/N
2) was 1.66, which is higher than that for N
2-CO
2 mixture.
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