We tried to fabricate pure Co
0.9Fe
0.1 ferromagnetic metal nano-contacts in the insulator layer of AlO
x. First, we verified the effect of natural oxidation (N.O.) and
in-situ annealing process, and we clarified the formation mechanism of Co
0.9Fe
0.1-AlO
x NOL. In N.O. process, Al is migrated from Co
0.9Fe
0.1/Al mixing layer (as deposition state) and cohered on the surface by oxygen. As the result, Co
0.9Fe
0.1 path is pure. By
in-situ annealing, Al near the surface migrate to the Co
0.9Fe
0.1/Al mixing surface by residual oxygen in the ultrahigh vacuum chamber, and the other Al diffuse to Co
0.9Fe
0.1 at the same time. Next, we observed the surface of Co
0.9Fe
0.1-AlO
x NOL by
in-situ conductive AFM (c-AFM). We confirmed the metal paths in an area with a diameter of about 1 nm.
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