BisB/Glu and BisB/Form novolac resins, which consist of bisphenol B (BisB) with a methyl propylidene group as a phenol (PhOH) component, glutaraldehyde (Glu) or formaldehyde (Form) as a crosslinking agent, have high level satisfactory properties of both flexibility and drawing ability as photoresist resins. On the other hand, dissolving rate for alkaline aqueous solution (DR) decreased with the increase of the mole ratio of the crosslinking agent, although the Mw change of both novolac resins was poor, regardless of the increase or decrease of the mole ratio of BisB and the crosslinking agent.In the reaction system in which the charged molar ratio of the crosslinking agent is high, the condensation reaction becomes difficult to progress by the steric hindrance of the methyl propylidene group of the BisB component, and the alkyl hydroxyl group proportion increases in the resulting molecule. Therefore, the structural analysis by MALDI TOF-MS measurement revealed that DR reduction occurred in spite of no significant change in Mw.
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