The roll coaters have been used for mass production through this half century. During this period, the low melting point metals, such as Aluminum, Zinc have been used for the films of packaging, decoration and capacitor at high deposition speed. Recently, further technology with thin oxide metal layers, like higher transparency for conductive transparent oxide layer and for gas barrier layer, is in demand on the market. Moreover, several kinds of oxide metal layers for Anti Refection, Low-e became very popular, particularly in IT industries. The key points for coating multi oxide layers on wide (width) film in production, like Anti Refection film, High-Transparent Conductive film, High Refection film and Low-E film, are to sustain a good uniformity constant, stable control for reactive sputtering process and high productivity. This article introduces the latest topics and technology concerning Sputter Roll Coater for the realization of a stable production of multi layer oxide system on several kinds of films.
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