BaTiO
3 thin films are prepared on various substrates (rock salt cleavage face, glass and platinum plate) by evaporation
in vacuo (10
-5 Torr) or in the argon atomosphere (10
-1 Torr). Evaporation is carried out in an ordinary vacuum evaporation unit with molybdenum or tantalum heating source. When powdered BaTiO
3 was evaporated, X-ray and electron diffraction methods revealed that the evaporant was decomposed to BaO and TiO
2.
It is observed that BaO turns out to be BaO
2 or α-BaCO
3 in air at room temperature and that as the temperature of the substrate is raised, crystal of BaTiO
3 is formed in the film. The single crystal pattern of BaTiO
3 is observed by electron diffraction method when the evaporation rate is fast and the substrate temperature is high. A sort of epitaxial growth of BaTiO
3 crystal is observed on a cleavage face of rock salt by the flashing evaporation method at higher temperatures. The higher the substrate temperature and the faster the evaporation rate, the easier is the crystal-lization of BaTiO
3.
抄録全体を表示