Progress in Spin-on Hard Mask Materials for Advanced Lithography
Released on J-STAGE: September 13, 2014 |
Volume 27
Issue 4
Pages 503-509
Munirathna Padmanaban, JoonYeon Cho, Takanori Kudo, Dalil Rahman, Huirong Yao, Douglas McKenzie, Alberto Dioses, Salem Mullen, Elizabeth Wolfer, Kazuma Yamamoto, Yi Cao, YoungJun Her