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CHRISTOPHER K. OBER, ALLEN H. GABOR
1996 Volume 9 Issue 1 Pages
1-11
Published: 1996
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Block copolymers consist of two or more polymer types connected as distinct strands. When incompatible blocks are combined, then phase separation can occur. In resist design, this offers the possibility of combining two distinct resist functions such as imaging and etch resistance using separate phases in a single polymer. Such separation of function may offer benefits in terms of dimensional stability, etch behavior and development characteristics. A series of 193nm imageable block and random copolymer resists based on t-butyl methacrylate and a silicon-containing methacrylate were studied to test these concepts and are reported here.
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Masahiro TSUNOOKA, Hideki TACHI, Yoshitaka SHIGERU
1996 Volume 9 Issue 1 Pages
13-16
Published: 1996
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MASAHIRO TSUNOOKA, TAKESHI IKEHARA, TOSHIKAZU TAKEMOTO, MASAMITSU SHIR ...
1996 Volume 9 Issue 1 Pages
17-20
Published: 1996
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YUKO TSUCHIYA, TOSHIO SAKAMIZU, HIROSHI SHIRAISHI
1996 Volume 9 Issue 1 Pages
21-24
Published: 1996
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HIRONORI OHMORI, KOJI ARIMITSU, KAZUAKI KUDO, YUKO HAYASHI, KUNIHIRO I ...
1996 Volume 9 Issue 1 Pages
25-28
Published: 1996
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KOJI ARIMITSU, KAZUAKI KUDO, YUKO HAYASHI, KUNIHIRO ICHIMURA
1996 Volume 9 Issue 1 Pages
29-30
Published: 1996
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Nobuyoshi Itho, Hiroyuki Fukuda
1996 Volume 9 Issue 1 Pages
31-32
Published: 1996
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Nobuaki Hayashi, Hajime Morishita, Masato Ito, Kyoko Kojima, Tetsuo Su ...
1996 Volume 9 Issue 1 Pages
33-39
Published: 1996
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The acrolein modified PVA(APVA) was prepared by Michael additon of acrolein with PVA. The new water soluble photoresist that consists of APVA and sodium dichromate(SDC) shows higher sensitivity than that of conventional PVA-SDC photoresist.
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YASUHIRO AKITA, HARUHISA AKIYAMA, KAZUAKI KUDO, YUKO HAYASHI, KUNIHIRO ...
1996 Volume 9 Issue 1 Pages
41-48
Published: 1996
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Photoproduct distribution in films of cinnamate polymers was analyzed to reveal the contribution of both photoisomerization and photodimerization to LC alignment photoregulation. A polymethacrylate with
o-cinnamate side chain displayed preferential formation of Z-isomer while the dimerization takes place more favorably for others including poly(vinyl cinnamate). Based on the relationship between photoproduct distribution and liquid crystal hotoalignment and on the reversibility of the photoinduced reorientation of a liquid crystal, it was concluded that the photoalignment results from the polarization photoisomerization of cinnamate residues in the same manner as that of photochromic moieties like azobenzenes whereas the (2+2) photodimerization plays a role in enhancing the thermal stability of the homogeneous photoalignment.
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HARUHISA AKIYAMA, KAZUAKI KUDO, YUKO HAYASHI, KUNIHIRO ICHIMURA
1996 Volume 9 Issue 1 Pages
49-52
Published: 1996
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DONG-HAE SUH, KAZUAKI KUDO, YUKO HAYASH, KUNIHIRO ICHIMURA
1996 Volume 9 Issue 1 Pages
53-56
Published: 1996
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MOTOKO YOSHIIWA, HIROSHI KAGEYAMA, FUJIO WAKAYA, MIKIO TAKAI, KENJI GA ...
1996 Volume 9 Issue 1 Pages
57-58
Published: 1996
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YOICHI SHINDO, YASUHIRO OHTA, MASATOSHI HASEGAWA
1996 Volume 9 Issue 1 Pages
59-62
Published: 1996
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NORIMITSU THONAI, MIKIJI MIYATA, YOSHIAKI INAKI
1996 Volume 9 Issue 1 Pages
63-64
Published: 1996
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HIROSHI MORITA, KAZUHIRO KANAZAWA, KATSUHIKO HASHIMOTO, TETSUYA TSUBAM ...
1996 Volume 9 Issue 1 Pages
65-71
Published: 1996
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Upon exposure to UV light, bis[2-(o-chlorophenyl)-4, 5-diphenylimidazole] (o-Cl-HABI) in solid polymer matrices such as bromo- and chloromethylated polystyrene (BCMS) and chloromethylated polystyrene (CMS) generates 2-(o-chlorophenyl)-4, 5-diphenylimidazolyl radical which rapidly abstracts a hydrogen atom from the polymer to produce the polymer radicals which eventually initiate crosslinking reaction of the polymer films. Efficiency of crosslink formation and relative efficiency in producing the polymer radicals were evaluated from the measurements of the gel fraction of solid films and of fluorescence intensity of the imidazole; both the efficiencies are higher in BCMS than in CMS, suggesting that a high sensitivity of crosslink formation is mainly due to high efficiency in producing the polymer radicals. Furthermore, by the application of a magnetic field, the efficiency of crosslink formation of BCMS/o-Cl-HABI was found to decrease slightly.
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KIMIHIRO HIRUTA, SUMIO TOKITA, YOSHIHIRO DAIKOKU, KICHISUKE NISHIMOTO
1996 Volume 9 Issue 1 Pages
73-78
Published: 1996
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Applying the procedure of precise Pariser-Parr-Pople molecular orbital (PPP MO) calculations, in which a novel two center electron repulsion integral new-γ was used and spectrochemical softness parameter in the new-γ was evaluated based on the spectroactive aromatic sextet resonance system (ASRS) of a molecule, the wavelengths of the
p-band of acenes and their higher analogues were predicted. The relationship between the annellation and the shift of the wavelength of the
p-band was revealed. The guideline to design PAHs which possess the long absorption wavelengths was proposed.
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KYOICHI SASAKI, TOSHIHIIKO NAGAMURA
1996 Volume 9 Issue 1 Pages
79-86
Published: 1996
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Highly sensitive polarized absorption measurement by the optical wave-guide detection system was proposed to analyze the optical characterestics of photoresponsive polymer thin films. The extinction coefficients of specific ion-pair charge-transfer complexes between polymeric 4, 4′-bipyridinium and tetrakis[3, 5-bis(trifluoromethyl)phenyl]borate film were estimated by this system. The thickness of these films estimated from observed OWG absorbance almost coincided with that by the ellipsometry. The accuracy of this analysis was supported by these results.
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MASAO KATO, TAKAYUKI OHONO, CHIKARA ISHII, HIRO MATSUDA, HACHIRO NAKAN ...
1996 Volume 9 Issue 1 Pages
87-92
Published: 1996
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A methacrylate copolymer, poly(MO), was prepared from radical copolymerization of octadecyl methacrylate and methacrylamide bearing DR-1 type azo-dye chromophore as NLO active group, which was synthesized through 7 reaction steps. Poly(MO) gave LB film on quartz substrate by the vertical dipping method. Transfer of the monolayer at the water-air interface was easier in upstroke than in down stroke. By SHG measurement for the multilayers it was found that only in the first monolayer exists an effective noncentrosymmetric structure of NLO chromophores, showing SHG. Unexpectedly, when a heat treatment was
performed SH intensity of the monolayer decreased, whereas that of the multilayers increased significantly. More detailed investigations about this heat response behavior were carried out.
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JUNICHI NAGASAWA, FUSAE NAKANISHI
1996 Volume 9 Issue 1 Pages
93-94
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EIJI IKADA
1996 Volume 9 Issue 1 Pages
95-103
Published: 1996
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Conventional polymers such as polyvinyl chloride generally show comparatively good durability in mild environments. As the quantity of plastics waste is now increasing, such good durability for polymers is not necessarily desirable from the point of environmental pollution due to diffusion of plastics waste. Thus, degradable polymers are demanded for special purpose. In this report, the photosensitizer benzophenone was grafted to polyvinyl chloride(PVC1) to investigate effects of enhancement of photo degradability of PVC1. Friedel-Crafts reaction was applied for this reaction. Formation of the carbonyl group in PVC1 and the molecular weight depression by UV irradiation was discussed. It was found that the graft of benzophenone to PVC1 was efficient for
enhancement of photo decomposition of PVC1.
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Hidetoshi Aoki, Takashi Tokuda, Yukio Nagasaki, Masao Kato
1996 Volume 9 Issue 1 Pages
105-108
Published: 1996
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Takanori Kudo, Yuki Nanjo, Yuko Nozaki, Kazuya Nagao, Hidemasa Yamaguc ...
1996 Volume 9 Issue 1 Pages
109-119
Published: 1996
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A novel pigment dispersed resist system (red, green and blue), which consists of a crosslinkable acrylate copolymer, a photoinitiator, and selected pigment dispersions has been developed. The materials combine excellent resistance to solvents, acids and alkalis, good thermal stability, light fastness, high transparency, chromaticity, contrast and film uniformity with adequate sensitivity (200mJ/cm
2), high resolution (≤_10μm) and large process margins. As the photospeed of conventional acrylate-based photopolymerizable resist systems is deteriorated in air due to oxygen induced inhibition reactions, the acrylate group was directly attached to the polymer, yielding high sensitivity even in the presence of oxygen. The application of a proprietary surfactant containing developer eliminated the formation of pigment residues after development.
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Takanori Kudo, Yuko Nozaki, Yuki Nanjo, Hidemasa Yamaguchi, Kazuya Nag ...
1996 Volume 9 Issue 1 Pages
121-130
Published: 1996
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A negative resist system composed of a phenolic resin, an azide, a crosslinker and a pigment dispersion has been developed for black matrix formation of color filters (CF). The novel pigmented photoresist (PPR), which consists of poly(4-hydroxystyrene), hexamethoxymethyl melamine, 4, 4′-diazidostilbene-2, 2′-disulfonic-N, N-diethyleneoxyethylamide and a dispersion of carbon black combines superior opacity (OD=3.5μm
-1), adequate resistance to solvents, acids and alkalis, good thermal stability, and film uniformity with excellent lithographic performance, such as high sensitivity (120mJ/cm
2), high resolution (≤_10μm) and wide process margins. The investigation of the dissolution behavior of the film via backside exposure and the reaction ratio of the azide indicates that the pattern formation mechanism occurs mainly via insolublilization of the resist surface in the exposed areas and subsequent etching of the resist layer by the alkaline developer.
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Heling Zhang, Yonglu Ren, Guangyong Zhang
1996 Volume 9 Issue 1 Pages
131-136
Published: 1996
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We give a minute description about technical difficult points of making super large scales hologram, and suggest a method of hardening DCG plate and enhancing diffraction efficiency by soak for a long time, dehydration many times, in order to keep uniform of brightness of reconstruction holographic image. It is the first time that we have a DCG reflection hologram which is about 102×46cm
2
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LIDONG LI, WEIDONG YANG, WEI XU, YONGYUAN YANG, CUNLIN ZHANG, CHANGGUI ...
1996 Volume 9 Issue 1 Pages
137-142
Published: 1996
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Bis(7-diethylaminocoumarin) ketone-3 (DEACK) can sensitize the homolysis of o-Chlorohexaarylbisimidazole (o-Cl-HABI). The radicals so generated can initiate the polymerization of methyl methacrylate (MMA) which was studied by dilatometry. The photopolymerization rate was determined to be proportional to the concentration with the exponent of 0.22, 0.80, 0.70 for DEACK, o-Cl-HABI, MMA, respectively. The system can be used as initiator of laser polymerization.
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Norman S. Allen, Michele Edge, Maura Tellez Rosas, Alfredo Rosales Jas ...
1996 Volume 9 Issue 1 Pages
143-155
Published: 1996
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The photoinduced radical co-polymerisation of methyl and allyl methacrylates has been monitored by gravimetric analysis, Fourier Transform infra-red (FTIR) and FT nmr spectroscopy using a range of different photofragmenting and hydrogen atom abstracting type initiators. Using both visible and UV light sources the rates of photo-co-polymerisation were found to follow similar trends in both bulk and solution phase. Furthermore, unlike thermal polymerisation where
crosslinking can occur through the allyl group, only the acrylate double bonds undergo reaction to produce a copolymer. GPC analysis showed that the homopolymers produced had narrower polydispersities than those of the copolymers while the photofragmenting type photoinitiators produced polymers with lower number average molecular mass than those produced via a hydrogen atom abstracting type. The latter is associated with marked differences in the degree of self-termination by initiator fragments. Structural analysis of the homo and copolymers by
1H FT nmr showed that photoinduced polymerisation produce polymers with a greater degree of stereoregularity than those obtained by conventional thermal radical initiation. Thus, the initiating process appears to play a major role in controlling the orientation of propagating chains.
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YUNHUA XU, BAOJUN QU, YUHENG ZHANG, BENGT RÅNBY
1996 Volume 9 Issue 1 Pages
157-164
Published: 1996
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H- and Y-type crosslinks formed in the benzophenone-photoinitiated crosslinking of various model compounds of low-density polyethylene (LDPE) have been observed and identified for the first time by
13C NMR spectroscopy. The quantitative studies show that both H- and Y-links are formed during the photo crosslinking of dodecane and their concentrations are almost the same; the yield of H-links in the crosslinked isooctane is slightly greater than that of Y-links; in contrast, Y-links are dominant for the crosslinked 1-hexene. These results further support the conclusions from the study of photo crosslinking of LDPE and give new experimental evidence for elucidating the mechanism of the photo crosslinking of LDPE.
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YUNHUA XU, BAOJUN QU, YUHENG ZHANG, BENGT RÅNBY
1996 Volume 9 Issue 1 Pages
165-172
Published: 1996
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Photolysis products of benzophenone (BP) as a photoinitiator in the photo crosslinking of polyethylene and its model compounds have been studied by means of fluorescence spectroscopy,
13C and
1H NMR, etc. The results show that the main photolysis products of benzophenone are benzpinacol and its isomers with quinoid structures. In addition, a small amount of α-alkylbenzhydrols probably exist in photolysis products of BP. These results provide new experimental evidence for elucidating the mechanism of photo crosslinking of polyethylene.
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WENFANG SHI, BENGT RÅNBY
1996 Volume 9 Issue 1 Pages
173-179
Published: 1996
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Hyperbranched polymers differ from classical oligomers and polymers by their structural symmetry, high degree of branching and maximized terminal functionality density. The divergent synthesis of a series of polydisperse hyperbranched polyesters based upon pentaerythritol and 1, 2, 4-benzenetricarboxylic anhydride, modified by glycidyl methacrylate and methacrylic anhydride is described, proceeding in a stepwise growth manner starting from an "initiator core", building hyperbranched arms. These materials have about 8, 12 or 16 methacrylate double bonds at the chain extremities on each molecule. The resulting hyperbranched methacrylated polyester resins are expected to have high photocure rate than linear unsaturated polyester by addition of photoinitiator and comonomer.
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