表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
68 巻 , 7 号
選択された号の論文の10件中1~10を表示しています
小特集/最新のMEMS事情
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研究論文
  • 麻野 亨, 林 秀考, 寺西 貴志, 岸本 昭, 石井 一也
    2017 年 68 巻 7 号 p. 401-404
    発行日: 2017/07/01
    公開日: 2018/07/01
    ジャーナル フリー

    This study investigated electrodeposition of Ni-Al(OH)3 composite films from a Watts type bath containing Al3+ and NO3. Because of NO3 reduction during nickel electrodeposition, the solution pH near the cathode increases. Then hydrolysis of Al3+ proceeds. Scanning electron microscopy(SEM)was used to characterize the composite surface. The aluminum hydroxide produced by the hydrolysis of Al3+ was estimated using energy dispersive X-ray spectrometry(EDX). Surface roughness of the deposits was measured using a three-dimensional surface profiler. Also, results obtained using X-ray diffractometry(XRD)and electron backscatter diffractometry(EBSD)revealed that the preferred crystallographic orientation of nickel changed from the [100] direction to [110] because of the aluminum hydroxide particles. By increasing the Al3+ concentration to 5.0×103 mol dm3, the deposit surface became smooth and the crystal size was found to decrease. Moreover the Vickers hardness increased in comparison to that obtained from an Al3+ free bath. These phenomena are regarded as strengthening effects related to grain size reduction.

  • 矢野 正明, 津留 豊
    2017 年 68 巻 7 号 p. 405-408
    発行日: 2017/07/01
    公開日: 2018/07/01
    ジャーナル フリー

    Using a plating solution containing CoSO4•7H2O, NaCl and H3BO3, direct current electrolysis (DC), pulsed current electrolysis (PC), and periodic reverse current electrolysis (PR) were used for cobalt deposition. DC increased in the range of -0.1 A/dm2 to -10 A/dm2. The minimum internal strain was 62×106 under -2.0 A/dm2. For PC, the internal strain was 62×106 to 84×106. For PR, the internal strain was 26×106 to 29×106, which was less than that of either DC or PC. It changed cyclically from tensile strain during deposition to relaxation during anodic dissolution of cobalt deposits. The surface morphology was investigated using scanning electron microscopy. Fine grain surfaces were observed in DC and PC. For PR, the surface morphology influenced the poorly defined hexagonal Co crystal. The X-ray diffraction pattern of the cobalt deposits can be obtained under both DC and PC. Both fcc {110} and hcp {11•0} structural planes were investigated during deposition. Especially, the fcc was formed originally. Then the fcc transformed drastically into the hcp. These grains spontaneously relaxed desorption of hydrogen with cobalt produced by the hydrogenated deposits. However, using PR, the hcp was different {10•0}, {10•1}, and {10•3} planes.

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