表面技術
Online ISSN : 1884-3409
Print ISSN : 0915-1869
ISSN-L : 0915-1869
76 巻, 1 号
選択された号の論文の10件中1~10を表示しています
小特集/大気圧プラズマ表面処理技術の最新動向
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研究論文
  • 田中 一平, 深澤 達矢, 原田 泰典
    2025 年76 巻1 号 p. 41-46
    発行日: 2025/01/01
    公開日: 2025/01/06
    ジャーナル フリー

    For this study, we synthesized diamond using the hot tube chemical vapor deposition (CVD) method, for which the filament of thermal filament CVD is replaced by cylindrical metal foil. Effects of the tube length, total gas flow rate, and distance between the gas outlet and the substrate were investigated when using this method. Diamond and nanocrystalline diamond (NCD) films were obtained with tube lengths greater than 10 mm. Additionally, longer tube lengths were associated with increased deposition rates and decreased film quality, suggesting enhanced gas decomposition. The deposition rate increased along with the total flow rate. At 1500 ℃ tube temperature, the maximum deposition rate of 6 μm/h was achieved under conditions of 3 mm substrate distance and 20 mm tube length. The intensity ratio of the diamond peak to the non-diamond peak, calculated from the Raman spectrum, reached a maximum value of 3.2 for 10 mm tube length and 10 mm substrate distance.

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