The nucleation, growth, and structure of electrodeposited Pd on Au thin films (about 600Å in thickness) were examined by electron microscopy. The Au thin films were prepared by electrodeposition on pure Fe from KCN bath, and its substrate was peeled off in 10% Nital. After scooped on a Mo grid, the films were annealed at 350°C for one hour in a vacuum furnace. The dislocation density of the films could turn to about 10
8-10
9cm
-2 by this treatment. Pd nuclei were three-dimensional platelets and grew up to about 200Å in diameter, which made up plate crystals arranged in good orientation. Preferential nucleation occurred at dislocations of the Au films. Pd films deposited on (001), (110), (211), and (310) Au thin films exhibited parallel orientations. The dislocation density of the overgrowth films of Pd was about 5-8×10
10cm
-2. Examination of parallel Moire patterns revealed that the difference of lattice constant between the Pd overgrowth film and the Au substrate was reduced by elastic strain. Thirteen (13)% of the misfit between 120Å of Pd overgrowth films and 600Å of Au substrate was accommodated by this strain. The percentage of misfit accommodated by the elastic strain decreased with the increase in thickness of the overgrowth film.
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