Electrodeposited Cu-Co alloys and Co from pyrophosphate baths were investigated by electron microscopy. Electron diffraction analyses revealed that the electrodeposited Cu-Co alloys formed a super saturated solid solution β(M), a Co rich h.c.p. solid solution ε′
E.D., and a Co rich f.c.c. solid solution α(M) at the cobalt concentrations of about 31 at.% or less, about 40-99 at.% and about 72-99 at.%, respectively. Consequently it was clear that these electrodeposited alloys differ from those in the equilibrium diagram. (β(M), α(M) and ε′
E.D. correspond to β, α and, ε′ in the equilibrium diagram; hence, suffix (M) indicates the metastable phase and E.D. the electrodeposit.) The lattice parameters of β(M), α(M), and ε′
E.D. were a≅3.60-3.62Å, a≅3.56-3.58Å and a≅2.51-2.54Å, c≅4.10-4.15Å, respectively. TEM observations revealed that the growth of these electrodeposited alloy films took place in the nucleation and growth process, and also, the deposits grew up to the plate-crystals consisting of finer crystallites of several hundred Å in size and containing many microtwins and fibrous crystals. SEM observations showed the alloy films became increasingly fine and smooth with an increase in Co content. Further, by the TEM observation it was found that the pseudomorphic growth took place in the about 50Å thick electrodeposited Co film on Cu substrate.
抄録全体を表示