In the electrochemical machining of steels in NaNO
3 and NaClO
3 electrolytes, it is well known that oxide films are formed on the surface at low current densities. The effects of physical and chemical properties of the oxide films upon machining precision was investigated for various steels and electrolytes at different current densities. Thickness, electric resistance, surface roughness and chemical composition and other properties of the oxide films were measured by use of X-ray fluorescent spectroscopy, a SQ meter, a proficorder and electron diffraction. For NaCl electrolyte, oxide film is not formed. For NaNO
3 and NaClO
3 electrolytes, porous oxide films, about 1μm thick, are formed on steels surface. Electric resistance of the oxide films decreases with an increase in the current efficiency. The chemical compositions of the oxide film on S45C steel were determined to be Fe
3O
4 for NaNO
3 electrolyte and γ-Fe
3O
4 for NaClO
3. The films in NaNO
3 were more conductivity than that in NaClO
3. It was found that the current efficiency depends on mainly electric resistance of the oxide films formed on steels surface.
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