The role of complexing agents in electroless plating baths on the properties of Co alloy films was studied with a view to obtain perpendicular magnetic anisotropy films. The increase in malonate concentration resulted in an increase in saturation magnetization,
Ms. The perpendicular anisotropy energy,
Ku, reached maximum at 0.6mol dm
-3 malonate, while the half-breadth of the rocking curve for
hcpCo (002) plane, ΔΘ
50, reached minimum at 0.3mol dm
-3. An increase in tartrate concentration sharply decreased the
Ms value and at low additive concentrations increased the
Ku value abruptly from negative to positive. The maximum
Ku and minimum ΔΘ
50 were obtained at 0.2mol dm
-3 tartrate. The succinate improved only the ΔΘ
50, reaching a minimum at 0.3mol dm
-3 succinate. The above effects of the complexing agents on magnetic properties were explained by changes in the composition of the films, and the merits of mixed complexing agents in the plating bath were discussed on the basis of the results obtained.
抄録全体を表示