Relations between coating conditions and properties of the TiC layer formed on SUS 304 stainless steels by activated reactive evaporation (ARE) were studied at electron beam (EB) emission currents ranging from 0.15 to 0.25A, and acetylene gas pressures ranging from 5×10
-4 to 1×10
-3 Torr. Other parameters were fixed: ionization current substrate bias=-2kV, and substrate temperatrue=400°C.
Preferable coating condition differed depending on the properties required. (A) Measurement of coating rate and ionization rate showed that an EB emission current of more than 0.17 A was required at any acetylene pressure. (B) Mesurement of composition by EPMA, lattice constant by X-ray diffraction and micro-vickers hardness of the TiC layer showed that the lowest possible EB emission current and the highest possible acetylene pressure was preferable. (C) Observation of adhesion showed that the lowest possible EB emission current and the lowest possible acetylene pressure was preferable.
Based on these observations, the conditions for obtaining the best TiC coating layer were found to lie within a limited range. In this experiment, optimum conditions were found to be 0.17A for the EB emission current and 8.5×10
-4 Torr for acetylene pressure.
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