The behavior of AC impedance was measured in the anodizing of aluminum in sodium sulfate and sulfuric acid solution under electrode potentials from-1V to 10V versus Hg/Hg
2SO
4, sat. K
2SO
4 electrode at frequencies of 1mHz-100kHz. The equivalent circuit was analyzed using an impedance diagram (Cole-Cole plot) of the formation of barrier film and porous film on aluminum. A capacitive semicircle (A) and a reactive semicircle (B) were obtained in sodium sulfate solution, and another capacitive semicircle (C) also appeared in sulfuric acid solution. The diameters of circles A, B and C, which corresponded to resistance (R) for each reaction, tended to decrease with the increase of potential. Capacitance (C
1) calculated from circle A decreased with increases in potential. It was concluded that R was a response of the reaction and C
1 was a response of the capacitance of the barrier film. The value of C
1 in sodium sulfate solution was almost the same as the value in sulfuric acid solution. The circle A tended to change to two circles in impedance diagrams measured at-1.0V in sodium sulfate solution after anodization for 1hour at 10V in sulfuric acid solution, because the film thickness increased by anodizing and the resistance of the film was changed.
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