The collective humidification method incorporating an outside air controller is mostly used to humidify outside air introduced into clean rooms for manufacturing electronic devices such as semiconductors and flat panel displays (FPDs). The method consumes a lot of heat energy in the form of steam and other forms. To reduce such heat loads, various heat recovery systems have been in practical use. However, the higher the effect, the larger the systems, which is why they are suitable for factories to be newly constructed but cannot be added to existing ones. This report suggests adding a water spray humidifier to the indoor system of an existing clean room as energy-saving equipment during wintertime, and estimates its energy-saving effect. By examining the amount of energy saved and CO_2 emissions reduced in a typical model, the effectiveness of water spray humidification for indoor systems was clarified.
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