Chemical vapor deposition of VB
2 on mild steel substrate was carried out with the hydrogen reduction of VOCl
3-BCl
3 mixture at the temperature range of 1, 073 to 1, 223K, [VOCl
3/(VOCl
3+BCl
3)] gas molar ratio region of 0.23 to 0.61, and reduction time of 1.8ks.
Thin films of 50μm consisting of pure VB
2 phase have been synthesized on the conditions of substrate temperature 1, 173K, and the gas ratio above 0.40. Smooth surface film of VB
2 having micro-vickers hardness of about
Hmv 2, 800 have been prepared at gas ratio above 0.5.
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