A high-resolution ultrasonic thickness measurement system for a thinner specimen has been developed. Thickness is obtained as the reciprocal number of peak frequencies which relate the period of ultrasonic multiple echo reflected from the specimen. By using FFT (Fast Fourier Transform) for the calculation of the frequency spectrum of the multiple echo, the resolution can be made easily higher. The resolution reaches 0.1μm at 0.25mm thickness measurement. Moreover, thickness can be measured in the case of a dull echo wave form because extraction of the peak frequency is easy.
In this paper, the principle of the system is studied first. The results are given below.
1. The frequency-based technique can measure a few times thinner thickness compared to the conventional time domain technique.
2. The sampling rate for analog to digital conversion of the received signal can be much lower than when the time domain technique is used.
3. Accuracy of the measurement is influenced by ultrasonic attenuation of the specimen.
Next, the experimental system is developed. To shorten the FFT calculation time, the sampling rate and the FFT points are lowered using a frequency conversion technique. The experiments show that the system measured a 0.25mm thickness with 0.1μm resolution using a 20MHz ultrasonic probe. In addition, in the case of a dull echo wave form reflected from a corner, thickness was measured.
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