Electrical process tomography is a recently developed imaging technique in which conductivity or permittivity images of a subject can be rapidly collected with channels of external electrodes. Usually electrical process tomography is visualized into a cross-sectional image representing the distribution of density. Therefore, the application of electrical process tomography to microchannels is considered in this paper. A novel microchannel system is designed for electrical process tomography that includes 60 electrodes distributed cross-sectionally at five positions. The present paper describes the fabrication of the microchannel. The fabrication method involves compressing platinum electrodes between quartz glass layers. This research is a first step to developing electrical process tomography for particles concentrations in a microchannel with 60 electrodes and simulated about multiphase flow. Using the electrical process tomography system in a microchannel, a particle distribution image can be obtained in a multiphase flow. Based on the reconstructed image, it is easy to estimate the particle diffusion behaviors in a fluid flow. In this study, we will discuss the technique used to fabricate a high-precision microchannel having 60 electrodes, which can be solved the impedance tomography in the multiphase flow. And the four kinds of current pattern are used in order to see the difference in two types of multiphase flow.

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