Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Volume 61 , Issue 10
Special Issue : Frontier in Nano Science by Scanning Probe Microscopy
Showing 1-16 articles out of 16 articles from the selected issue
Preface
Special Issue : Frontier in Nano Science by Scanning Probe Microscopy
Regular article
  • A.N. ITAKURA, M. TOSA, T. YAKABE, N. MIYAUCHI, A. KASAHARA, T. MIYATA, ...
    Type: Regular article
    2018 Volume 61 Issue 10 Pages 675-680
    Published: October 10, 2018
    Released: October 10, 2018
    JOURNALS FREE ACCESS

    We have developed chromium oxide layer segregated on electrolytic polished stainless steel (SS316L) surface as inner coat of the ultra-high vacuum chamber. In order to investigate the superiority of the surface of chromium oxide on electrolytic polished surface compared with the only electrolytic polished surface, the thermal desorption characteristics and the initial exhaust characteristics after the air exposure were investigated. We found that the initial evacuation such as mass number m/z=14 (mixture of N and CH2) and 18 (H2O) as well as reduction of hydrogen release amount in temperature raising desorption is faster than electrolytic polished surface. It was found to be suitable for surface treatment when quick exhaust of high vacuum region such as a load lock chamber is desired.

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