表面と真空
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61 巻 , 4 号
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巻頭言
2017年真空・表面科学合同講演会特集号 [I]
論文
  • Tetsuya MIYAZAWA, Kensuke TOBISHIMA, Hiroo KATO, Masashi KURIHARA, Shi ...
    原稿種別: Regular article
    61 巻 (2018) 4 号 p. 227-235
    公開日: 2018/04/10
    ジャーナル フリー

    We have developed a new non-evaporable getter (NEG) coating using titanium and palladium vacuum sublimation. The inner wall of the test chamber was coated with a 1-µm Ti thin film using the Ti sublimation pumps under a vacuum of 6.5×10−6 Pa (Ti-coated chamber). This chamber was then coated with a 10-nm Pd thin film using the Pd sublimation filament under a vacuum of 2.4×10−4 Pa (Pd/Ti-coated chamber). The uncoated, Ti-coated, and Pd/Ti-coated chambers were baked for 6 h at a maximum temperature of 185℃. Five hours after closing the valve, the pressures in the Pd/Ti-coated chamber were about 1.4×10−6 Pa even after six heating–venting cycles. The relatively low activation temperature was attributed to the low concentration of oxygen in the Pd/Ti thin films. The Pd/Ti coating can be used for vacuum systems that are frequently vented.

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  • 清水 元希, 鈴木 菜摘, 那須 裕一, 坪井 嶺, 倉橋 裕之, 荒川 一郎, 山川 紘一郎
    原稿種別: 論文
    61 巻 (2018) 4 号 p. 236-243
    公開日: 2018/04/10
    ジャーナル 認証あり

    An apparatus for terahertz spectroscopy in an ultrahigh vacuum has been developed. We used broadband Mylar for the beam splitter in a Fourier transform spectrometer, diamond for optical windows, and a liquid-helium-cooled Si bolometer for the terahertz detector to achieve the spectral range of 50–650 cm−1. For the purpose of keeping the ultrahigh vacuum in a sample chamber, we evacuated the whole optical path by turbo molecular pumps and made its pressure down to 10−4 Pa. Using this apparatus, we measured temperature dependence of the terahertz spectrum of D2O ice vapor-deposited at 10 K. The spectral changes due to the structural transformation from amorphous ice to cubic crystalline ice Ic were successfully observed in the range of 140–160 K. We report the spectral difference between low-density and high-density amorphous ice as well as that between hexagonal crystalline ice Ih and cubic one.

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