表面と真空
Online ISSN : 2433-5843
Print ISSN : 2433-5835
最新号
特集「2018年日本表面真空学会学術講演会特集号II」
選択された号の論文の17件中1~17を表示しています
巻頭言
特集「2018年日本表面真空学会学術講演会特集号II」
論文
  • 日高 輝, 吉村 幸雄, 萬膳 一成, 新田 敦司
    原稿種別: 論文
    2019 年 62 巻 7 号 p. 443-447
    発行日: 2019/07/10
    公開日: 2019/07/10
    ジャーナル 認証あり

    Recently, transparent conductive films used for flexible devices have been studied. Indium tin oxide, which is commonly used as a transparent conductive film material, has excellent electrical and optical characteristics. However, it has poor flexibility. Our group focuses on AZO/Ag/AZO multilayer films that are flexible and highly conductive. One disadvantage of AZO/Ag/AZO multilayer films is that interdiffusion at the AZO/Ag interface affects the optical characteristics. In this study, we discuss the effects of the deposition temperature on each layer. Depositing Ag at room temperature suppressed oxygen diffusion into Ag and improved the multilayer film's transmittance. Consequently, a AZO/Ag/AZO multilayer film with a resistivity of 1.15×10-4 Ω cm and an average transmittance of 80.2% was obtained.

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