The fundamentals for understanding metal corrosion in aqueous solutions are first explained in terms of thermodynamics and kinetics of electrochemical corrosion reactions, illustrating the validity of a local cell model for the uniform corrosion behavior of iron and stainless steels. Then, the passivation process of stainless steels and the important properties of their passive films are described. Finally, recent studies on the pit initiation mechanism at sulfide inclusions of stainless steels are introduced, which provides a valuable information to develop a next-generation green stainless steel.
Lubricant in a manipulation mechanism is a key technology for an ultra-high vacuum equipment. Lubricant for ultra-high vacuum requires high durability, high wear resistant and low outgassing in order to implement a high-performance manipulation mechanism and develop a multi-functional ultra-high vacuum equipment. We developed high-performance molybdenum disulfide solid lubricant sputter coating in ultrahigh vacuum environment.
We have developed a method of micro arc oxidation treatment as a surface treatment of aluminum alloy used for vacuum equipment using corrosive gas such as chemical vapor deposition (CVD) equipment. The oxide layer formed by the micro arc oxidation (MAO) treatment was evaluated. The oxide layer formed by MAO had a three layer structure of crystalline γ-alumina. Moreover, it turned out that the oxide layer does not contain other than the element derived from a base material. It was found that the outgassing amount of the aluminum alloy covered with this oxide layer was 1/10 compared to the sulfuric acid alumite treatment.
The cause of contaminations of the inner wall of the vacuum chamber and inside samples or wafers are thought to be metal particles.
The metal particles are generated due to corrosion of the chamber itself, pipes, various parts and flanges, made of metal such as stainless steel. In this paper I introduce surface treatment and its effect as countermeasure against metal contamination caused by corrosion of stainless steel.
Osmium coating on microstructures becomes possible by the plasma CVD technique. A metallic osmium film has excellent heat-resistance, conductivity, hardness and environmental performance. An osmium film coated on an electron-microscope aperture-plate is very effective in electrified restraint and beam damage reduction.