The paper reports on heterodyne laser doppler interferometry and photothermal excitation applied to Atomic Force Microscopy. The combination of the above mentioned interferometry and excitation methods allows the use of small and stiff cantilevers or higher oscillation modes up to the 100MHz regime, as well as the use of multimodal vibrations and amplitude of drive in the 10 pm order. Since excitation acts directly on the oscillator, suprious free excitation is implemented both in liquid, air and vacuum. Phase rotation around modes are clean, allowing multiple modulation schemes such as phase modulation and frequency modulation to be employed.
抄録全体を表示